WO2007092593A3 - Probe repair methods - Google Patents

Probe repair methods Download PDF

Info

Publication number
WO2007092593A3
WO2007092593A3 PCT/US2007/003475 US2007003475W WO2007092593A3 WO 2007092593 A3 WO2007092593 A3 WO 2007092593A3 US 2007003475 W US2007003475 W US 2007003475W WO 2007092593 A3 WO2007092593 A3 WO 2007092593A3
Authority
WO
WIPO (PCT)
Prior art keywords
probe card
panel
probe
affixed
repair methods
Prior art date
Application number
PCT/US2007/003475
Other languages
French (fr)
Other versions
WO2007092593A2 (en
Inventor
Bahadir Tunaboylu
John Mcglory
Horst Clauberg
Bruce Griffing
Robert E Werner
Edward T Laurent
Edward L Malantonio
Alan Slopey
Paul Bereznycky
Original Assignee
Sv Probe Pte Ltd
Bahadir Tunaboylu
John Mcglory
Horst Clauberg
Bruce Griffing
Robert E Werner
Edward T Laurent
Edward L Malantonio
Alan Slopey
Paul Bereznycky
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/704,016 external-priority patent/US7437813B2/en
Application filed by Sv Probe Pte Ltd, Bahadir Tunaboylu, John Mcglory, Horst Clauberg, Bruce Griffing, Robert E Werner, Edward T Laurent, Edward L Malantonio, Alan Slopey, Paul Bereznycky filed Critical Sv Probe Pte Ltd
Publication of WO2007092593A2 publication Critical patent/WO2007092593A2/en
Publication of WO2007092593A3 publication Critical patent/WO2007092593A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Abstract

A method for repairing a probe on a probe card is provided. A plurality of beams (222', 224' ) is formed on a beam panel (250'). The plurality of beams includes a replacement beam. After identifying a damaged beam on the probe card, the damaged beam is removed from the probe card. The beam panel is aligned with the probe card. After the beam panel is aligned, the aligned beam panel is temporarily affixed to the probe card. After the beam panel is temporarily affixed to the probe card, the replacement beam is affixed at a location previously occupied by the damaged beam. After the replacement beam is affixed at the location, the beam panel is removed from the probe card.
PCT/US2007/003475 2006-02-08 2007-02-08 Probe repair methods WO2007092593A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US77155406P 2006-02-08 2006-02-08
US60/771,554 2006-02-08
US11/704,016 2007-02-07
US11/704,016 US7437813B2 (en) 2006-02-08 2007-02-07 Probe repair methods

Publications (2)

Publication Number Publication Date
WO2007092593A2 WO2007092593A2 (en) 2007-08-16
WO2007092593A3 true WO2007092593A3 (en) 2007-11-29

Family

ID=38345820

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/003475 WO2007092593A2 (en) 2006-02-08 2007-02-08 Probe repair methods

Country Status (1)

Country Link
WO (1) WO2007092593A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010009376A1 (en) * 2000-01-24 2001-07-26 Kiyoshi Takekoshi Probe arrangement assembly, method of manufacturing probe arrangement assembly, probe mounting method using probe arrangement assembly, and probe mounting apparatus
US20020194730A1 (en) * 2001-06-21 2002-12-26 Da-Yuan Shih Process and structure to repair damaged probes mounted on a space transformer
US20030113990A1 (en) * 2001-12-19 2003-06-19 Formfactor, Inc. Microelectronic spring contact repair
US20050179456A1 (en) * 1996-03-12 2005-08-18 Beaman Brian S. High density cantilevered probe for electronic devices

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050179456A1 (en) * 1996-03-12 2005-08-18 Beaman Brian S. High density cantilevered probe for electronic devices
US20010009376A1 (en) * 2000-01-24 2001-07-26 Kiyoshi Takekoshi Probe arrangement assembly, method of manufacturing probe arrangement assembly, probe mounting method using probe arrangement assembly, and probe mounting apparatus
US20020194730A1 (en) * 2001-06-21 2002-12-26 Da-Yuan Shih Process and structure to repair damaged probes mounted on a space transformer
US20030113990A1 (en) * 2001-12-19 2003-06-19 Formfactor, Inc. Microelectronic spring contact repair

Also Published As

Publication number Publication date
WO2007092593A2 (en) 2007-08-16

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