WO2005057614A3 - Extractor/buffer - Google Patents

Extractor/buffer Download PDF

Info

Publication number
WO2005057614A3
WO2005057614A3 PCT/US2004/040055 US2004040055W WO2005057614A3 WO 2005057614 A3 WO2005057614 A3 WO 2005057614A3 US 2004040055 W US2004040055 W US 2004040055W WO 2005057614 A3 WO2005057614 A3 WO 2005057614A3
Authority
WO
WIPO (PCT)
Prior art keywords
extractor
wip
parts
buffer
buffer apparatus
Prior art date
Application number
PCT/US2004/040055
Other languages
French (fr)
Other versions
WO2005057614A2 (en
Inventor
William John Fosnight
Michael Bufano
Gerald Friedman
Robert Sullivan
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Publication of WO2005057614A2 publication Critical patent/WO2005057614A2/en
Publication of WO2005057614A3 publication Critical patent/WO2005057614A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Abstract

An automated material handling system that includes an extractor/buffer apparatus (102) capable of simultaneously accessing multiple Work-In-Process (WIP) parts (116, 117, 124), thereby providing a highly efficient interface between WIP storage locations (103) and transport equipment (140). The extractor/buffer apparatus includes multiple extractor/buffer modules (104), each module being configured to interface with a location for holding WIP parts that is a number of WIP parts deep. Each module includes a platform (130) for holding multiple WIP parts. Further, multiple modules may be disposed side-by-side to form an extractor/buffer apparatus capable of handling multiple rows of WIP parts.
PCT/US2004/040055 2003-12-03 2004-12-01 Extractor/buffer WO2005057614A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/727,353 US7101138B2 (en) 2003-12-03 2003-12-03 Extractor/buffer
US10/727,353 2003-12-03

Publications (2)

Publication Number Publication Date
WO2005057614A2 WO2005057614A2 (en) 2005-06-23
WO2005057614A3 true WO2005057614A3 (en) 2005-12-15

Family

ID=34677112

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/040055 WO2005057614A2 (en) 2003-12-03 2004-12-01 Extractor/buffer

Country Status (2)

Country Link
US (1) US7101138B2 (en)
WO (1) WO2005057614A2 (en)

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US7993088B2 (en) * 2005-03-09 2011-08-09 The Kroger Co. Storage system having a dynamic support of moving elements and a pusher assembly carried by a frame
US20080019804A1 (en) * 2004-06-14 2008-01-24 Hirata Corporation Container Opening-Closing Apparatus and Container-Placement-Position Adjustment Method for the Same
DE102004032659B4 (en) * 2004-07-01 2008-10-30 Atotech Deutschland Gmbh Apparatus and method for the chemical or electrolytic treatment of material to be treated and the use of the device
US7578650B2 (en) * 2004-07-29 2009-08-25 Kla-Tencor Technologies Corporation Quick swap load port
US7722307B2 (en) * 2004-09-03 2010-05-25 Daifuku America Corporation System and method for handling stocked items
US8202035B2 (en) * 2004-10-08 2012-06-19 Sbs Method and installation for automatic processing of baggage
JP4296601B2 (en) * 2005-01-20 2009-07-15 村田機械株式会社 Conveyor cart system
US7410340B2 (en) * 2005-02-24 2008-08-12 Asyst Technologies, Inc. Direct tool loading
US7604449B1 (en) * 2005-06-27 2009-10-20 Kla-Tencor Technologies Corporation Equipment front end module
US7762755B2 (en) * 2005-07-11 2010-07-27 Brooks Automation, Inc. Equipment storage for substrate processing apparatus
US20080107507A1 (en) * 2005-11-07 2008-05-08 Bufano Michael L Reduced capacity carrier, transport, load port, buffer system
US8267634B2 (en) * 2005-11-07 2012-09-18 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
WO2007056443A2 (en) * 2005-11-07 2007-05-18 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
US20070201967A1 (en) * 2005-11-07 2007-08-30 Bufano Michael L Reduced capacity carrier, transport, load port, buffer system
US20070289843A1 (en) * 2006-04-18 2007-12-20 Barry Kitazumi Conveyor System Including Offset Section
KR20140069354A (en) 2006-08-18 2014-06-09 브룩스 오토메이션 인코퍼레이티드 Reduced capacity carrier, transport, load port, buffer system
US20080050208A1 (en) * 2006-08-25 2008-02-28 Barry Kitazumi High speed transporter including horizontal belt
US20080125900A1 (en) * 2006-09-15 2008-05-29 Maxim Carmen A Method and apparatus for scheduling material transport in a semiconductor manufacturing facility
JP2008120586A (en) * 2006-11-15 2008-05-29 Daifuku Co Ltd Article storage device
US7934898B2 (en) * 2007-07-16 2011-05-03 Semitool, Inc. High throughput semiconductor wafer processing
US8070410B2 (en) * 2008-02-05 2011-12-06 Lutz Rebstock Scalable stocker with automatic handling buffer
US9633881B2 (en) 2008-02-05 2017-04-25 Brooks Automation, Inc. Automatic handling buffer for bare stocker
US9214372B2 (en) * 2008-08-28 2015-12-15 Tokyo Ohka Kogyo Co., Ltd. Substrate processing system, carrying device and coating device
US8919756B2 (en) * 2008-08-28 2014-12-30 Tokyo Ohka Kogyo Co., Ltd. Substrate processing system, carrying device, and coating device
TWI447059B (en) * 2012-01-10 2014-08-01 Inotera Memories Inc Wafer stocker
US20140119873A1 (en) * 2012-10-31 2014-05-01 Shenzhen China Star Optoelectronics Technology Co., Ltd. Device for Transporting Cassette
KR102174332B1 (en) * 2014-07-30 2020-11-04 삼성전자주식회사 Stockers of Fabricating Semiconductors and Wafer Transferring Method Using the Same
KR102315825B1 (en) * 2019-07-09 2021-10-21 세메스 주식회사 Stocker

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US6670568B2 (en) * 1999-05-07 2003-12-30 Infineon Technologies Ag Installation for processing wafers

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Publication number Priority date Publication date Assignee Title
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US4492504A (en) * 1981-12-07 1985-01-08 Bell & Howell Company Materials handling system
US6670568B2 (en) * 1999-05-07 2003-12-30 Infineon Technologies Ag Installation for processing wafers
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US20030185656A1 (en) * 2002-03-29 2003-10-02 Rudolf Hansl Support frame for a telescopic arm of a load-handling system and a method of manipulating storage units

Also Published As

Publication number Publication date
US7101138B2 (en) 2006-09-05
US20050135906A1 (en) 2005-06-23
WO2005057614A2 (en) 2005-06-23

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