USB581564I5 - - Google Patents

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Publication number
USB581564I5
USB581564I5 US58156475A USB581564I5 US B581564 I5 USB581564 I5 US B581564I5 US 58156475 A US58156475 A US 58156475A US B581564 I5 USB581564 I5 US B581564I5
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US
United States
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to US05/581,564 priority Critical patent/US4036653A/en
Publication of USB581564I5 publication Critical patent/USB581564I5/en
Application granted granted Critical
Publication of US4036653A publication Critical patent/US4036653A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/597—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon oxynitride, e.g. SIALONS
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/02—Amorphous compounds
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/10—Solid density
US05/581,564 1975-05-28 1975-05-28 Amorphous silicon nitride composition containing carbon, and vapor phase process Expired - Lifetime US4036653A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US05/581,564 US4036653A (en) 1975-05-28 1975-05-28 Amorphous silicon nitride composition containing carbon, and vapor phase process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/581,564 US4036653A (en) 1975-05-28 1975-05-28 Amorphous silicon nitride composition containing carbon, and vapor phase process

Publications (2)

Publication Number Publication Date
USB581564I5 true USB581564I5 (en) 1976-03-23
US4036653A US4036653A (en) 1977-07-19

Family

ID=24325687

Family Applications (1)

Application Number Title Priority Date Filing Date
US05/581,564 Expired - Lifetime US4036653A (en) 1975-05-28 1975-05-28 Amorphous silicon nitride composition containing carbon, and vapor phase process

Country Status (1)

Country Link
US (1) US4036653A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4073845A (en) 1976-01-29 1978-02-14 Gte Sylvania Incorporated High density high strength S13 N4 ceramics prepared by pressureless sintering of partly crystalline, partly amorphous S13 N4 powder
US4122155A (en) 1977-01-03 1978-10-24 General Electric Company Preparation of silicon nitride powder
CN114773069A (en) * 2022-05-09 2022-07-22 秦皇岛光岩科技有限公司 Preparation method of high-thermal conductivity silicon nitride ceramic substrate for high-power integrated circuit

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4070198A (en) * 1976-03-05 1978-01-24 Corning Glass Works SiO2 -Al2 O3 -N glass for production of oxynitride glass-ceramics
DE2812019C2 (en) * 1978-03-18 1982-06-03 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Device for producing a preform from silicon nitride
US4336304A (en) * 1979-05-21 1982-06-22 The United States Of America As Represented By The United States Department Of Energy Chemical vapor deposition of sialon
JPS5617988A (en) * 1979-07-24 1981-02-20 Toshio Hirai Electroconductive si3n44c type noncrystalline material by chemical gas phase deposition and its manufacture
US4289801A (en) * 1980-05-21 1981-09-15 United Technologies Corporation Method for producing fine grained pyrolytic silicon nitride
US4500483A (en) * 1982-03-19 1985-02-19 United Technologies Corporation Manufacture of hollow CVD silicon nitride articles
JPS5921506A (en) * 1982-07-27 1984-02-03 Ube Ind Ltd Manufacture of crystalline silicon nitride powder
US4579699A (en) * 1983-09-29 1986-04-01 The Boeing Company Method for making α-Si3 N4 whiskers and articles therefrom
US4594330A (en) * 1984-03-22 1986-06-10 Mitsubishi Gas Chemical Company, Inc. Fine amorphous powder and process for preparing fine powdery mixture of silicon nitride and silicon carbide
US4613490A (en) * 1984-05-08 1986-09-23 Mitsubishi Gas Chemical Company, Inc. Process for preparing silicon nitride, silicon carbide or fine powdery mixture thereof
JPS62125015A (en) * 1985-11-19 1987-06-06 Toa Nenryo Kogyo Kk High-purity silicon nitride fiber and production thereof
US5187129A (en) * 1987-12-21 1993-02-16 Eaton Corporation Process for making silicon nitride and powders and articles made therefrom
US5176893A (en) * 1989-10-02 1993-01-05 Phillips Petroleum Company Silicon nitride products and method for their production
US5085582A (en) * 1990-07-24 1992-02-04 Eaton Corporation Silicon nitride containers for the sintering of silicon nitride ceramics
US5055432A (en) * 1990-07-24 1991-10-08 Eaton Corporation Process for preparing a nitridable silicon-containing material having at least one densification aid including alumina, and the material resulting therefrom
US5213729A (en) * 1990-07-24 1993-05-25 Eaton Corporation Process for preparing a densified beta-phase silicon nitride material having at least one densification aid, and the material resulting therefrom
US5252248A (en) * 1990-07-24 1993-10-12 Eaton Corporation Process for preparing a base nitridable silicon-containing material
US5160719A (en) * 1990-07-24 1992-11-03 Eaton Corporation Process for nitriding silicon containing materials
US5156830A (en) * 1990-07-24 1992-10-20 Eaton Corporation Process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase material
US5079198A (en) * 1990-07-24 1992-01-07 Eaton Corporation Ceramic phase in sintered silicon nitride containing cerium, aluminum, and iron
US6007789A (en) * 1992-11-03 1999-12-28 Eaton Corporation Method of nitriding silicon
AU4090600A (en) 1999-06-30 2001-01-04 Rohm And Haas Company High performance heat exchangers
EP2437880B1 (en) * 2009-06-04 2018-09-12 Air Liquide Advanced Materials LLC Method for the production of silylamines
DE102011075974A1 (en) * 2011-05-17 2012-11-22 Evonik Degussa Gmbh Process for the preparation of trisilylamine in the gas phase
JP6041527B2 (en) * 2012-05-16 2016-12-07 キヤノン株式会社 Liquid discharge head

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3226194A (en) * 1962-09-10 1965-12-28 United Aircraft Corp Process for producing silicon nitride and a product thereof
US3352637A (en) * 1963-05-30 1967-11-14 Knapsack Ag Process and apparatus for the manufacture of nitride powders of the elements aluminum, boron, silicon or zirconium
US3574677A (en) * 1966-04-29 1971-04-13 Siemens Ag Method of producing a protective layer from a semiconductor nitrogen compound for semiconductor purposes
DE1957952A1 (en) * 1969-11-18 1971-05-27 Siemens Ag Silicon nitride coating on quartz walls for diffusion and oxidation reactors
US3637423A (en) * 1969-02-10 1972-01-25 Westinghouse Electric Corp Pyrolytic deposition of silicon nitride films
US3652331A (en) * 1968-03-22 1972-03-28 Shumpei Yamazaki Process for forming a film on the surface of a substrate by a gas phase

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3253886A (en) * 1961-05-09 1966-05-31 Union Carbide Corp Process for producing ultrafine powders of refractory materials
US3492100A (en) * 1966-11-25 1970-01-27 Centre Nat Rech Scient Process for obtaining simple and mixed carbonitrides and oxycarbonitrides of transition metals and new metallic carbonitrides and oxycarbonitrides containing such metals
US3565674A (en) * 1967-10-30 1971-02-23 Motorola Inc Deposition of silicon nitride
DE2243527A1 (en) * 1972-09-05 1974-04-18 Bayer Ag MOLDED BODIES FROM HOMOGENOUS MIXTURES OF SILICON CARBIDE AND SILICON NITRIDE AND THE PROCESS FOR THEIR PRODUCTION
US3979500A (en) * 1973-05-02 1976-09-07 Ppg Industries, Inc. Preparation of finely-divided refractory powders of groups III-V metal borides, carbides, nitrides, silicides and sulfides
US3959446A (en) * 1974-03-01 1976-05-25 The United States Of America As Represented By The Secretary Of The Air Force Synthesis of high purity, alpha phase silicon nitride powder

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3226194A (en) * 1962-09-10 1965-12-28 United Aircraft Corp Process for producing silicon nitride and a product thereof
US3352637A (en) * 1963-05-30 1967-11-14 Knapsack Ag Process and apparatus for the manufacture of nitride powders of the elements aluminum, boron, silicon or zirconium
US3574677A (en) * 1966-04-29 1971-04-13 Siemens Ag Method of producing a protective layer from a semiconductor nitrogen compound for semiconductor purposes
US3652331A (en) * 1968-03-22 1972-03-28 Shumpei Yamazaki Process for forming a film on the surface of a substrate by a gas phase
US3637423A (en) * 1969-02-10 1972-01-25 Westinghouse Electric Corp Pyrolytic deposition of silicon nitride films
DE1957952A1 (en) * 1969-11-18 1971-05-27 Siemens Ag Silicon nitride coating on quartz walls for diffusion and oxidation reactors

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4073845A (en) 1976-01-29 1978-02-14 Gte Sylvania Incorporated High density high strength S13 N4 ceramics prepared by pressureless sintering of partly crystalline, partly amorphous S13 N4 powder
US4122155A (en) 1977-01-03 1978-10-24 General Electric Company Preparation of silicon nitride powder
CN114773069A (en) * 2022-05-09 2022-07-22 秦皇岛光岩科技有限公司 Preparation method of high-thermal conductivity silicon nitride ceramic substrate for high-power integrated circuit

Also Published As

Publication number Publication date
US4036653A (en) 1977-07-19

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