|
| US4190019 | 14 sep 1977 | 26 feb 1980 | | Vacuum metallizing interior of hollow article with masking shield |
| US4191128 | 7 nov 1978 | 4 mar 1980 | | Vacuum metallizing of hollow articles |
| US4500407 | 19 jul 1983 | 19 feb 1985 | Varian Associates, Inc. | Disk or wafer handling and coating system |
| US4637342 | 26 feb 1985 | 20 jan 1987 | Canon Kabushiki Kaisha | Vacuum processing apparatus |
| US4666734 | 5 maj 1983 | 19 maj 1987 | Canon Kabushiki Kaisha | Apparatus and process for mass production of film by vacuum deposition |
| US4756815 | 21 dec 1979 | 12 jul 1988 | Varian Associates, Inc. | Wafer coating system |
| US4797054 | 13 jun 1986 | 10 jan 1989 | Fujitsu Limited | Apparatus for loading and unloading a vacuum processing chamber |
| US4820106 | 2 sep 1987 | 11 apr 1989 | Leybold-Heraeus GmbH | Apparatus for passing workpieces into and out of a coating chamber through locks |
| US4951603 | 12 sep 1988 | 28 aug 1990 | Daidousanso Co., Ltd. | Apparatus for producing semiconductors |
| US5002010 | 18 okt 1989 | 26 mar 1991 | Varian Associates, Inc. | Vacuum vessel |
| US5024747 | 1 jun 1988 | 18 jun 1991 | Varian Associates, Inc. | Wafer coating system |
| US5112469 | 27 aug 1990 | 12 maj 1992 | Leybold Aktiengesellschaft | Apparatus for the inward and outward transfer of a workpiece in a vacuum chamber |
| US5183547 | 19 apr 1991 | 2 feb 1993 | Sony Corporation | Sputtering apparatus and system for sputtering employing same |
| US5190590 | 8 apr 1991 | 2 mar 1993 | Matsushita Electric Industrial Co., Ltd. | Vacuum coating apparatus |
| US5245736 | 26 maj 1992 | 21 sep 1993 | Balzers Aktiengesellschaft | Vacuum process apparatus |
| US5259942 | 5 jun 1992 | 9 nov 1993 | Leybold Aktiengesellschaft | Device for transferring a workpiece into and out from a vacuum chamber |
| US5281320 | 4 apr 1991 | 25 jan 1994 | Varian Associates Inc. | Wafer coating system |
| US5503675 | 7 dec 1993 | 2 apr 1996 | Leybold Aktiengesellschaft | Apparatus for applying a mask to and/or removing it from a substrate |
| US5538560 | 26 jul 1994 | 23 jul 1996 | Leybold Aktiengesellschaft | Vacuum coating apparatus |
| US5773088 | 5 dec 1995 | 30 jun 1998 | Materials Research Group, Inc. | Treatment system including vacuum isolated sources and method |
| US5849087 | 1 jul 1997 | 15 dec 1998 | Leybold Systems GmbH | Vacuum treatment system for applying thin layers to substrates such as headlights reflectors |
| US6096231 | 25 jan 1999 | 1 aug 2000 | Balzers Aktiengesellschaft | Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method |
| US6113749 | 12 apr 1996 | 5 sep 2000 | Odme International B.V. | Sputtering method in multi-chambered device |
| US6193804 | 2 okt 1999 | 27 feb 2001 | Taiwan Semiconductor Manufacturing Company, Ltd | Apparatus and method for sealing a vacuum chamber |
| US6203677 | 28 sep 1998 | 20 mar 2001 | Leybold Systems GmbH | Sputtering device for coating an essentially flat disk-shaped substrate |
| US6264804 | 12 apr 2000 | 24 jul 2001 | SKE Technology Corp. | System and method for handling and masking a substrate in a sputter deposition system |
| US6406598 | 25 maj 2001 | 18 jun 2002 | STEAG HamaTech AG | System and method for transporting and sputter coating a substrate in a sputter deposition system |
| US6413381 | 12 apr 2000 | 2 jul 2002 | Steag HamaTech AG | Horizontal sputtering system |
| US6554980 | 16 okt 1997 | 29 apr 2003 | Leybold Optics GmbH | Vacuum treatment apparatus for deposition of thin layers on three-dimensional substrates |
| US6620252 | 29 okt 2001 | 16 sep 2003 | Thomson Licensing S.A. | Metallization module for cathode-ray tube (CRT) applications |
| US6793735 | 27 dec 2000 | 21 sep 2004 | International Business Machines Corporation | Integrated cobalt silicide process for semiconductor devices |
| US6818108 | 17 jul 2001 | 16 nov 2004 | Unaxis Balzers Aktiengesellschaft | Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece |
| USRE40191 | 3 nov 1997 | 1 apr 2008 | OC Oerlikon Balzers AG | Vacuum process apparatus |
| USRE40192 | 19 jul 2000 | 1 apr 2008 | OC Oerlikon Balzers AG | Vacuum process apparatus |
