|
| US4934102 | 4 okt 1988 | 19 jun 1990 | International Business Machines Corporation | System for mechanical planarization |
| US5607341 | 8 aug 1994 | 4 mar 1997 | | Method and structure for polishing a wafer during manufacture of integrated circuits |
| US5700179 | 29 jul 1996 | 23 dec 1997 | Shin-Etsu Handotai Co., Ltd. | Method of manufacturing semiconductor wafers and process of and apparatus for grinding used for the same method of manufacture |
| US5702290 | 8 apr 1996 | 30 dec 1997 | | Block for polishing a wafer during manufacture of integrated circuits |
| US5733175 | 25 apr 1994 | 31 mar 1998 | | Polishing a workpiece using equal velocity at all points overlapping a polisher |
| US5836807 | 25 apr 1996 | 17 nov 1998 | | Method and structure for polishing a wafer during manufacture of integrated circuits |
