US20170207122A1 - Self-aligned device level contact structures - Google Patents
Self-aligned device level contact structures Download PDFInfo
- Publication number
- US20170207122A1 US20170207122A1 US15/470,006 US201715470006A US2017207122A1 US 20170207122 A1 US20170207122 A1 US 20170207122A1 US 201715470006 A US201715470006 A US 201715470006A US 2017207122 A1 US2017207122 A1 US 2017207122A1
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- Prior art keywords
- layer
- gate
- laterally spaced
- silicon dioxide
- contact
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- 125000006850 spacer group Chemical group 0.000 claims abstract description 69
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 139
- 239000000463 material Substances 0.000 claims description 83
- 239000000377 silicon dioxide Substances 0.000 claims description 74
- 235000012239 silicon dioxide Nutrition 0.000 claims description 74
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 61
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 58
- 239000011810 insulating material Substances 0.000 claims description 41
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 26
- 238000009413 insulation Methods 0.000 claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 19
- 239000010410 layer Substances 0.000 description 214
- 238000000034 method Methods 0.000 description 98
- 230000008569 process Effects 0.000 description 64
- 238000005530 etching Methods 0.000 description 32
- 238000004519 manufacturing process Methods 0.000 description 21
- 239000000758 substrate Substances 0.000 description 21
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000012545 processing Methods 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 238000011112 process operation Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- 229920005591 polysilicon Polymers 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 5
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000000873 masking effect Effects 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
- 125000001475 halogen functional group Chemical group 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002070 nanowire Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- -1 titanium-aluminum-carbon Chemical compound 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02362—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment formation of intermediate layers, e.g. capping layers or diffusion barriers
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- H—ELECTRICITY
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
-
- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
- H01L21/31055—Planarisation of the insulating layers involving a dielectric removal step the removal being a chemical etching step, e.g. dry etching
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- H—ELECTRICITY
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76837—Filling up the space between adjacent conductive structures; Gap-filling properties of dielectrics
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- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823437—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
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- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823475—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type interconnection or wiring or contact manufacturing related aspects
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
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- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823821—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
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Definitions
- the present disclosure generally relates to integrated circuit products, and more particularly, to integrated circuit products having self-aligned device level contact structures.
- FETs field effect transistors
- circuit elements such as microprocessors, storage devices and the like
- FETs field effect transistors
- circuit elements are provided and operated on a restricted chip area.
- FETs come in a variety of different configurations, e.g., planar devices, FinFET devices, nanowire devices, etc. These FET devices are typically operated in a switched mode, that is, these devices exhibit a highly conductive state (on-state) and a high impedance state (off-state).
- the state of the field effect transistor is controlled by a gate electrode, which controls, upon application of an appropriate control voltage, the conductivity of a channel region formed between a drain region and a source region.
- the gate structures for such transistor devices may be manufactured using so-called “gate-first” or “replacement gate” (gate-last) manufacturing techniques.
- the channel length of FETs has been significantly decreased, which has resulted in improving the switching speed of FETs.
- decreasing the channel length of a FET also decreases the distance between the source region and the drain region. In some cases, this decrease in the separation between the source and the drain makes it difficult to efficiently inhibit the electrical potential of the source region and the channel from being adversely affected by the electrical potential of the drain. This is sometimes referred to as a so-called short channel effect, wherein the characteristic of the FET as an active switch is degraded.
- a so-called FinFET device has a three-dimensional (3D) structure. That is, the gate structure of a FinFET device may be positioned around both the sides and the upper surface of a portion of a fin that was previously defined in the substrate to thereby form a tri-gate structure so as to use a channel having a three-dimensional structure instead of a planar structure. That is, unlike a planar FET, in a FinFET device, a channel is formed perpendicular to a surface of the semiconducting substrate so as to reduce the physical size of the semiconductor device.
- FinFET the junction capacitance at the drain region of the device is greatly reduced, which tends to significantly reduce short channel effects.
- FinFETs tend to be able to generate significantly higher drive current density than planar transistor devices.
- the gate structures of most transistor elements were comprised of a plurality of silicon-based materials, such as a silicon dioxide and/or silicon oxynitride gate insulation layer, in combination with a polysilicon gate electrode and a silicon nitride gate cap layer.
- silicon-based materials such as a silicon dioxide and/or silicon oxynitride gate insulation layer
- polysilicon gate electrode and a silicon nitride gate cap layer the gate structures of most transistor elements (planar or FinFET devices) were comprised of a plurality of silicon-based materials, such as a silicon dioxide and/or silicon oxynitride gate insulation layer, in combination with a polysilicon gate electrode and a silicon nitride gate cap layer.
- gate structures that include a so-called high-k dielectric gate insulation layer and one or more metal layers that function as the gate electrode (HK/MG) have been implemented.
- HK/MG gate electrode
- Such alternative gate structures have been shown to provide significantly enhanced operational characteristics over the heretofore more traditional silicon dioxide/polysilicon gate structure configurations.
- FIGS. 1A-1E simplistically depict one illustrative prior art method for forming an HK/MG replacement gate structure using a replacement gate technique on a planar transistor device. As shown in FIG. 1A , the process includes the formation of a basic transistor structure above a semiconducting substrate 12 in an active area defined by a shallow trench isolation structure 13 . At the point of fabrication depicted in FIG.
- the device 10 includes a sacrificial gate insulation layer 14 , a dummy or sacrificial gate electrode 15 , a sidewall spacer 16 , a layer of insulating material 17 and source/drain regions 18 formed in the substrate 12 .
- the various components and structures of the device 10 may be formed using a variety of different materials and by performing a variety of known techniques.
- the sacrificial gate insulation layer 14 may be comprised of silicon dioxide
- the sacrificial gate electrode 15 may be comprised of polysilicon or amorphous silicon
- the sidewall spacer 16 may be comprised of silicon nitride
- the layer of insulating material 17 may be comprised of silicon dioxide.
- the source/drain regions 18 may be comprised of implanted dopant materials (N-type dopants for NMOS devices and P-type dopants for PMOS devices) that are implanted into the substrate 12 using known masking and ion implantation techniques.
- CMP chemical mechanical polishing
- FIG. 1B depicts the device 10 after one or more etching processes were performed to remove the sacrificial gate electrode 15 and the sacrificial gate insulation layer 14 to thereby define a gate cavity 20 where a replacement gate structure will subsequently be formed.
- the sacrificial gate insulation layer 14 is removed as part of the replacement gate technique, as depicted herein. However, the sacrificial gate insulation layer 14 may not be removed in all applications.
- various layers of material that will constitute a replacement gate structure 30 are formed in the gate cavity 20 . Even in cases where the sacrificial gate insulation layer 14 is intentionally removed, there will typically be a very thin native oxide layer (not shown) that forms on the substrate 12 within the gate cavity 20 .
- the materials used for the replacement gate structures 30 for NMOS and PMOS devices are typically different.
- the replacement gate structure 30 for an NMOS device may be comprised of a high-k gate insulation layer 30 A, such as hafnium oxide, a first metal layer 30 B (e.g., a layer of titanium nitride), a second metal layer 30 C—a so-called work function adjusting metal layer for the NMOS device—(e.g., a layer of titanium-aluminum or titanium-aluminum-carbon), a third metal layer 30 D (e.g., a layer of titanium nitride) and a bulk metal layer 30 E, such as aluminum or tungsten.
- a high-k gate insulation layer 30 A such as hafnium oxide
- a first metal layer 30 B e.g., a layer of titanium nitride
- a second metal layer 30 C a so-called work function adjusting metal layer for the NMOS device—(e.g., a layer of titanium-aluminum or titanium-aluminum-carbon)
- one or more CMP processes are performed to remove excess portions of the gate insulation layer 30 A, the first metal layer 30 B, the second metal layer 30 C, the third metal layer 30 D and the bulk metal layer 30 E positioned outside of the gate cavity 20 to thereby define the replacement gate structure 30 for an illustrative NMOS device.
- the replacement gate structure 30 for a PMOS device does not include as many metal layers as does an NMOS device.
- the gate structure 30 for a PMOS device may only include the high-k gate insulation layer 30 A, a single layer of titanium nitride (the work function adjusting metal for the PMOS device) and the bulk metal layer 30 E.
- FIG. 1E depicts the device 10 after several process operations were performed.
- one or more etching processes were performed to remove upper portions of the various materials within the gate cavity 20 so as to form a recess within the gate cavity 20 .
- a gate cap layer 31 comprised of silicon nitride was formed in the recess above the recessed gate materials.
- the gate cap layer 31 may be formed by depositing a layer of gate cap material so as to over-fill the recess formed in the gate cavity 20 and, thereafter, performing a CMP process to remove excess portions of the gate cap material layer positioned above the surface of the layer of insulating material 17 .
- the gate cap layer 31 is formed so as to protect the underlying gate materials during subsequent processing operations.
- the material(s) of the gate insulation layer are initially formed above the substrate 12 , typically by oxidation (silicon dioxide) or by deposition (a high-k insulating material). Thereafter, the material(s) that will constitute the gate electrode structure (e.g., polysilicon or one or more layers of metal) are deposited above the gate insulation layer. Thereafter, the material for the gate cap layer, e.g., silicon nitride, is deposited above the uppermost gate material layer. A patterned layer of photoresist is then formed above the layer of gate cap material and an etching process is performed to pattern the layer of gate cap material.
- the material(s) of the gate insulation layer are initially formed above the substrate 12 , typically by oxidation (silicon dioxide) or by deposition (a high-k insulating material). Thereafter, the material(s) that will constitute the gate electrode structure (e.g., polysilicon or one or more layers of metal) are deposited above the gate insulation layer. Thereafter, the material for the gate cap layer, e
- the patterned layer of photoresist is then removed and the gate material(s) are patterned by performing one or more etching processes using the patterned gate cap layer as an etch mask. Thereafter, silicon nitride spacers are formed adjacent the patterned gate electrode structure which, in combination with the gate cap layer, serves to encapsulate and protect the gate electrode.
- the electrical connections of the individual circuit elements cannot be established within the same device level on which the circuit elements are manufactured, but require one or more additional metallization layers, which generally include metal-containing lines providing the intra-level electrical connection, and also include a plurality of inter-level connections or vertical connections, which are also referred to as vias.
- additional metallization layers which generally include metal-containing lines providing the intra-level electrical connection, and also include a plurality of inter-level connections or vertical connections, which are also referred to as vias.
- These vertical interconnect structures comprise an appropriate metal and provide the electrical connection of the various stacked metallization layers.
- an appropriate vertical device level contact structure is provided, a first end of which is connected to a respective contact region of a circuit element, such as a gate electrode and/or the drain and source regions of a transistor, and a second end that is connected to a respective metal line in the so-called M1 metallization layer by a conductive via.
- a circuit element such as a gate electrode and/or the drain and source regions of a transistor
- a second end that is connected to a respective metal line in the so-called M1 metallization layer by a conductive via.
- the conductive device level contact elements have to be provided with critical dimensions on the same order of magnitude.
- the device level contact elements typically represent plugs or lines, which are formed of an appropriate metal or metal composition, wherein, in sophisticated semiconductor devices, tungsten, in combination with appropriate barrier materials, has proven to be a viable contact metal.
- contact openings are formed in a self-aligned manner by removing dielectric material, such as silicon dioxide, selectively from the spaces between closely spaced gate structures. That is, after completing the transistor structure, the silicon nitride materials (the spacer 16 and the gate cap layer 31 ) that surround and encapsulate the gate electrode structures 30 are effectively used as etch masks for selectively removing the silicon dioxide material between adjacent gate structures in order to expose the source/drain regions of the transistors, thereby providing self-aligned trenches or openings which are substantially laterally delineated by the spacer structures 16 on adjacent gate electrode structures 30 .
- dielectric material such as silicon dioxide
- FIG. 2A schematically illustrates a cross-sectional view of an integrated circuit product 40 at an advanced manufacturing stage.
- the product 40 comprises a plurality of illustrative and simplistically depicted gate structures 41 that are formed above a substrate 42 , such as a silicon substrate.
- the gate structures 41 are comprised of an illustrative gate insulation layer 43 and an illustrative gate electrode 44 that are formed in a gate cavity 45 using a gate-last or replacement-gate processing technique.
- An illustrative gate cap layer 46 and a sidewall spacer 48 encapsulate and protect the gate structures 41 .
- the gate cap layer 46 and the sidewall spacer 48 are typically made of silicon nitride.
- Also depicted in FIG. 2A are a plurality of raised source/drain regions 50 and a layer of insulating material 52 , e.g., silicon dioxide.
- FIG. 2B depicts the product 40 after a self-aligned contact opening 54 was formed in the layer of insulating material 52 for a self-aligned contact through a patterned etch mask, e.g. photoresist (not shown).
- a patterned etch mask e.g. photoresist (not shown).
- the formation of the contact openings 54 may be done with a single etch mask layer or it may be done using two or more different etch masks.
- the contact etch process performed to form the opening 54 is primarily directed at removing the desired portions of the layer of insulating material 52 (e.g., silicon dioxide), portions of the protective gate cap layer 46 (silicon nitride) and the protective sidewall spacers 48 (silicon nitride) also get consumed during the contact etch process, as simplistically depicted in the dashed regions 56 . Loss of protective material in the region 56 can lead to exposure of the conductive gate electrode of the gate structure 41 and create an electrical short with the conductive device level contact that will be formed in the contact opening 54 . Such an electrical short can render the affected transistors inoperable for their intended purpose.
- the layer of insulating material 52 e.g., silicon dioxide
- the thickness of these protective materials must be sufficient such that, even after the contact etch process is completed, there remains sufficient cap layer material and spacer material to protect the gate structures 41 . Accordingly, device manufacturers tend to make the cap layers 46 and spacers 48 “extra thick,” i.e., with an additional thickness that may otherwise not be required but for the consumption of the cap layers 46 and the spacers 48 during the contact etch process.
- the present disclosure is directed to various methods of forming self-aligned device level contact structures on integrated circuit products that may avoid, or at least reduce, the effects of one or more of the problems identified above.
- One illustrative integrated circuit product disclosed herein includes two laterally spaced-apart transistors, wherein each of the two laterally spaced-apart transistors includes a gate structure, a gate cap layer positioned above the gate structure, and a sidewall spacer positioned adjacent to sidewalls of the gate structure.
- the disclosed integrated circuit product further includes, among other things, a source/drain region that is positioned between the two laterally spaced-apart transistors, a conformal etch stop layer that is positioned on and in contact with an upper surface of the source/drain region and on and in contact with a sidewall surface of the sidewall spacer of each of the two laterally spaced-apart transistors, and a self-aligned conductive contact that extends through an opening in the conformal etch stop layer and is conductively coupled to the source/drain region.
- an integrated circuit product in another exemplary embodiment of the present disclosure, includes two laterally spaced-apart transistors, wherein each of the two laterally spaced-apart transistors includes a gate structure, a silicon dioxide gate cap layer positioned above the gate structure, and a silicon nitride sidewall spacer positioned adjacent to sidewalls of the gate structure, wherein the silicon nitride spacer covers a lower sidewall surface portion of the gate cap layer.
- Each of the two laterally spaced-apart transistors also includes a silicon dioxide spacer cap layer positioned on and in contact with an upper surface of the silicon nitride sidewall spacer, wherein the silicon dioxide spacer cap layer covers an upper sidewall surface portion of the gate cap layer.
- the illustrative integrated circuit product further includes a layer of silicon dioxide insulating material positioned above each of the two laterally spaced-apart transistors, a source/drain region positioned between the two laterally spaced-apart transistors, and a conformal silicon dioxide etch stop layer that is positioned on and in contact with an upper surface of the source/drain region, on and in contact with a sidewall surface of the silicon nitride sidewall spacer of each of the two laterally spaced-apart transistors, and on and in contact with a sidewall surface of the silicon dioxide spacer cap layer of each of the two laterally spaced-apart transistors.
- the disclosed integrated circuit product includes a self-aligned conductive contact positioned in an opening that extends through the layer of silicon dioxide insulating material and through the conformal silicon dioxide etch stop layer, wherein the self-aligned conductive contact is conductively coupled to the source/drain region.
- an exemplary integrated circuit product includes, among other things, two laterally spaced-apart transistors, wherein each of the two laterally spaced-apart transistors includes a gate structure, a silicon dioxide gate cap layer positioned above the gate structure, and a silicon nitride sidewall spacer positioned adjacent to sidewalls of the gate structure, wherein the silicon nitride spacer covers a lower sidewall surface portion of the gate cap layer.
- the disclosed integrated circuit product also includes a layer of silicon dioxide insulating material positioned above each of the two laterally spaced-apart transistors, a silicon nitride liner layer positioned between the layer of silicon dioxide insulating material and at least the silicon dioxide gate cap layer of each of the two laterally spaced-apart transistors, and a source/drain region positioned between the two laterally spaced-apart transistors.
- the illustrative integrated circuit product further includes a conformal silicon dioxide etch stop layer that is positioned on and in contact with an upper surface of the source/drain region and on and in contact with a sidewall surface of the silicon nitride sidewall spacer of each of the two laterally spaced-apart transistors, as well as a self-aligned conductive contact positioned in an opening that extends through the layer of silicon dioxide insulating material, through the silicon nitride liner layer, and through the conformal silicon dioxide etch stop layer, wherein the self-aligned conductive contact is conductively coupled to the source/drain region.
- a conformal silicon dioxide etch stop layer that is positioned on and in contact with an upper surface of the source/drain region and on and in contact with a sidewall surface of the silicon nitride sidewall spacer of each of the two laterally spaced-apart transistors, as well as a self-aligned conductive contact positioned in an opening that extends through the layer of silicon dioxide
- FIGS. 1A-1E depict one illustrative prior art method of forming a gate structure of a transistor using a so-called “replacement gate” or “gate-last” manufacturing technique;
- FIGS. 2A-2B schematically illustrate a cross-sectional view of an illustrative prior art integrated circuit product that employs self-aligned contacts
- FIGS. 3A-3S depict one illustrative method disclosed herein for forming self-aligned device level contact structures on integrated circuit products.
- FIGS. 4A-4I depict another illustrative method disclosed herein for forming self-aligned device level contact structures on integrated circuit products.
- the present disclosure generally relates to various methods of forming self-aligned device level contact structures on integrated circuit products.
- the methods and devices disclosed herein may be employed in manufacturing products using a variety of technologies, e.g., NMOS, PMOS, CMOS, etc., and they may be employed in manufacturing a variety of different devices, e.g., memory products, logic products, ASICs, etc.
- the inventions disclosed herein may be employed in forming integrated circuit products using transistor devices in a variety of different configurations, e.g., planar devices, FinFET devices, nanowire devices, etc.
- the gate structures for such devices may be formed using either “gate first” or “replacement gate” manufacturing techniques.
- the presently disclosed inventions should not be considered to be limited to any particular form of transistors or the manner in which the gate structures of the transistor devices are formed.
- the inventions disclosed herein should not be considered to be limited to the illustrative examples depicted and described herein.
- various illustrative embodiments of the methods and devices disclosed herein will now be described in more detail.
- the various layers of material described below may be formed by any of a variety of different known techniques, e.g., a chemical vapor deposition (CVD) process, an atomic layer deposition (ALD) process, a thermal growth process, spin-coating techniques, etc.
- the word “adjacent” is to be given a broad interpretation and should be interpreted to cover situations where one feature actually contacts another feature or is in close proximity to that other feature.
- FIGS. 3A-3S depict one illustrative method disclosed herein for forming self-aligned device level contact structures on integrated circuit products.
- the illustrative product 100 will be formed in and above the semiconductor substrate 102 .
- the product 100 may comprise either NMOS transistors, PMOS transistors or both types of transistors. Additionally, various doped regions, e.g., source/drain regions, halo implant regions, well regions and the like, are not depicted in the attached drawings.
- the substrate 102 may have a variety of configurations, such as the depicted bulk silicon configuration.
- the substrate 102 may also have a silicon-on-insulator (SOI) configuration that includes a bulk silicon layer, a buried insulation layer and an active layer, wherein semiconductor devices are formed in and above the active layer.
- SOI silicon-on-insulator
- the substrate 102 may be made of silicon or it may be made of materials other than silicon.
- substrate or “semiconductor substrate” should be understood to cover all semiconducting materials and all forms of such materials.
- FIG. 3A depicts the product 100 at a point in fabrication wherein several process operations have been performed.
- a plurality of illustrative gate structures 104 were formed above the substrate 102 .
- Each of the gate structures 104 includes a schematically depicted sacrificial gate structure 106 , a sidewall spacer 108 and a gate cap layer 110 .
- the sacrificial gate structure 106 typically includes a sacrificial gate insulation layer (not separately shown), such as silicon dioxide, and a dummy or sacrificial gate electrode (not separately shown), such as polysilicon or amorphous silicon.
- the sidewall spacer 108 and the gate cap layer 110 are typically comprised of silicon nitride.
- the gate structures 104 may be formed using well-known processing techniques. After the gate structures 104 were formed, an epi semiconductor material 114 was formed in the source/drain regions 113 of the transistor devices, thereby forming “raised” source/drain regions. As shown in FIG.
- the “raised” epi semiconductor material 114 covers a lower sidewall portion of the sidewall spacers 108 , whereas the upper sidewall portion of the spacers 108 remain exposed.
- the epi semiconductor material 114 need not be formed in all applications.
- the physical size of the gate structures 104 and the gate pitch for the gate structures may vary depending upon the particular application.
- FIG. 3B depicts the product 100 after an etch stop layer 116 was formed on the product 100 by performing a conformal deposition process.
- the conformal etch stop layer 116 is formed having substantially horizontally oriented portions covering an upper surface of the epi semiconductor material 114 (or the upper surface of the substrate 102 in the source/drain regions 113 in those embodiments wherein the epi semiconductor material 114 ) and upper surfaces of the sidewall spacers 108 and gate cap layers 108 , as well as substantially vertically oriented portions covering the upper sidewall portions of the sidewall spacers 108 that extend above the epi semiconductor material 114 (or the entire outer sidewall surfaces of the spacers 108 when the epi semiconductor material 114 is not formed).
- the etch stop layer 116 may be comprised of a variety of materials, e.g., silicon dioxide, etc., and it may be formed by performing a conformal ALD or CVD process.
- the thickness of the etch stop layer 116 may vary depending upon the particular application, e.g., 3-6 nm.
- FIG. 3C depicts the product 100 after a layer of material 118 was formed on the product 100 by performing a conformal deposition process.
- the layer of material 118 may be comprised of a variety of materials, e.g., silicon nitride, etc., and it may be formed by performing a conformal ALD or CVD process.
- the thickness of the layer of material 118 may vary depending upon the particular application, e.g., 20-30 nm.
- the layer of material 118 Given the pitch between the gate structures 104 , the layer of material 118 will typically “pinch-off” in the space between adjacent gate structures 104 above the source/drain regions 113 so as to substantially fill the space between adjacent gate structures 104 .
- some voids may be present in the material 118 positioned between adjacent gate structures 104 .
- FIG. 3D depicts the product 100 after a timed, recess etching process was performed on the layer of material 118 .
- the recessed layer of insulating material has a recessed upper surface 118 R that is positioned at a level that is below a level of an upper surface 106 X of the sacrificial gate structure 106 , e.g., by a distance of about 2-10 nm.
- FIG. 3E depicts the product 100 after an illustrative layer of insulating material 120 , e.g., silicon dioxide, was blanket deposited above the product 100 .
- insulating material 120 e.g., silicon dioxide
- FIG. 3F depicts the product 100 after one or more planarization processes (e.g., CMP) were performed to remove a portion of the layer of insulating material 120 and the substantially horizontally oriented portions of the etch stop layer 116 that were formed above the upper surfaces of the sidewall spacers 108 and gate cap layers 108 , thus leaving the substantially horizontally oriented portions of the etch stop layer 116 covering the upper surface of the epi semiconductor material 114 and the substantially vertically oriented portions covering the upper sidewall portions of the sidewall spacers 108 . Furthermore, at the completion of the planarization process, the upper surfaces 110 X of the gate cap layers 110 are exposed.
- CMP planarization processes
- FIG. 3G depicts the product 100 after one or more planarization processes (e.g., CMP) were performed to remove the gate cap layers 110 and portions of the sidewall spacers 108 so as to thereby expose the upper surface 106 X of the sacrificial gate structure 106 for further processing, i.e., so that the sacrificial gate structure 106 can be removed. Also as shown in FIG. 3G , and upper part of the substantially vertically oriented portions of the etch stop layer 116 are removed along with the portions of the sidewall spacers 108 .
- CMP planarization processes
- FIG. 3H depicts the product 100 after one or more wet or dry etching processes were performed to remove the sacrificial gate structures 106 (gate insulation layer plus gate electrode) to thereby define a plurality of gate cavities 122 where replacement gate structures will subsequently be formed for the product 100 .
- the sacrificial gate insulation layer (not separately shown) is removed as part of the replacement gate technique. Even in cases where the sacrificial gate insulation layer is intentionally removed, there may typically be a very thin native oxide layer (not shown) that forms on the surface of the substrate within the gate cavities 122 .
- the next major process sequence involves formation of the replacement gate structures 124 for the product 100 .
- the replacement gate structures 124 that will be depicted herein are intended to be representative in nature of any type of gate structure that may be employed in manufacturing integrated circuit products using so-called gate-last (replacement-gate) manufacturing techniques.
- gate-last replacement-gate
- the presently disclosed inventions may be employed in situations where the gate structures for the transistor devices are formed using well-known gate first manufacturing techniques.
- a pre-clean process was performed in an attempt to remove all foreign materials from within the gate cavities 122 prior to forming the various layers of material that will become part of the replacement gate structures 124 .
- a high-k (k value greater than 10) gate insulation layer 124 A such as hafnium oxide (or the other high-k materials), was deposited across the substrate 102 and within the gate cavities 122 by performing a conformal deposition process.
- FIG. 3J depicts the product 100 after a layer of insulating material 126 (e.g., silicon dioxide) was formed above the product 100 using traditional deposition techniques.
- the layer of insulating material 126 over-fills the recess above the replacement gate structures 124 within the gate cavities 122 .
- FIG. 3K depicts the product 100 after one or more planarization processes (e.g., CMP) were performed on the layer of insulating material 126 such that the upper surface of the layer of insulating material 126 is substantially even with the upper surface of the spacers 108 .
- This process operation results in a plurality of gate cap layers 126 A positioned above the replacement gate structures 124 .
- the method disclosed herein involves the formation of gate cap layers 126 A made of silicon dioxide as compared to traditional gate cap layers that are typically made of silicon nitride.
- the present subject matter can be employed when forming self-aligned contacts on integrated circuit products wherein gate structures may be formed using so-called “gate-first” manufacturing techniques.
- An analogous structure to that depicted in FIG. 3K , wherein the transistors were made using gate first manufacturing techniques could be made as follows. Rather than forming the dummy or sacrificial gate structures 106 , the materials for the gate insulation layer (silicon dioxide or a high k material), the gate electrode (polysilicon or metal layers) and a gate cap material (silicon dioxide) could be initially formed across the substrate 102 . Thereafter, all of these materials could then be patterned so as to define a basic gate structure with a silicon dioxide gate cap layer on top of the gate electrode. Sidewall spacers 108 (e.g., silicon nitride) could then be formed adjacent each of the gate structures.
- the materials for the gate insulation layer silicon dioxide or a high k material
- the gate electrode polysilicon or metal layers
- a gate cap material silicon dioxide
- the etch stop layer 116 and the silicon nitride layer 118 could then be formed as shown in FIGS. 3C-3D . At that point, processing would continue with the formation of the layer 120 ( FIG. 3E ) and polishing that would stop on the nitride spacers 108 . These steps would result in the structure depicted in FIG. 3K but the gates would be manufactured using a gate first manufacturing technique.
- FIG. 3L depicts the product 100 after a timed, spacer recess etching process was performed to reduce the height of the sidewall spacers 108 such that they have an upper surface 108 R that is recessed relative to the gate cap layers 126 A and the substantially vertically oriented portions of the etch stop layer 116 .
- FIG. 3L shows that after completion of the timed spacer recess etching process, upper sidewall surface portions of the gate cap layer 126 A and of the substantially vertically oriented portions of the etch stop layer 116 are exposed above the recessed upper surface 108 R of the sidewall spacers 108 .
- the spacer recess etching process is performed for such a duration that the recessed surface 108 R of the spacers 108 is positioned at a level that is above a level of the upper surface 124 X of the replacement gate structures 124 , e.g., by a distance of about 3-5 nm.
- FIG. 3M depicts the product 100 after several processing operations were performed.
- another layer of insulating material 128 e.g., silicon dioxide
- the layer of insulating material 128 fills the space that was previously formed above the recessed surface 108 R of the sidewall spacers 108 (see, FIG. 3L ) and also re-covers the previously exposed upper sidewall surface portions of the gate cap layer 126 A and of the substantially vertically oriented portions of the etch stop layer 116 (see, FIG. 3L ).
- a hard mask layer 130 e.g., silicon nitride was formed above the layer of insulating material 128 .
- the material layers 128 , 130 may be formed to any desired thickness.
- the pitch of the gate structures 124 is such that the final pattern for the contact openings will be defined in the hard mask layer 130 by performing two separate masking and etching processes.
- the final pattern for the contact openings may be defined in the hard mask layer 130 by performing a single masking and etching process.
- FIG. 3N depicts the product 100 after a first plurality of openings 130 A were defined in the hard mask layer 130 by performing an etching process through a first patterned photoresist mask (not shown), and after the first photoresist mask was stripped.
- 3O depicts the product 100 after a second plurality of openings 130 B were defined in the hard mask layer 130 by performing an etching process through a second patterned photoresist mask (not shown), and after the second photoresist mask was stripped. These process operations result in the formation of a patterned hard mask layer 130 X having openings corresponding to the contact openings for the self-aligned contacts.
- FIG. 3P depicts the product 100 after an etching process was performed to remove the exposed portions of the silicon dioxide materials (layers 128 , 120 , 116 ) not covered by the patterned hard mask layer 130 X.
- the duration of this etching process is such that it is stopped when the upper surface 118 R of the silicon nitride material 118 is exposed.
- portions of the layer of insulating material 128 remain in the space formed above the recessed upper surface 108 R of the sidewall spacers 108 , which may thereby serve as a spacer cap layer.
- FIG. 3Q depicts the product 100 after an etching process was performed to remove the exposed silicon nitride material 118 above the silicon dioxide etch stop layer 116 that is positioned on the upper surface of the source/drain region 113 , thus exposing both the remaining substantially horizontally and vertically oriented portions of the etch stop layer 116 . Note that during this etching process, the patterned hard mask layer 130 X is also etched away. These operations result in the formation of a plurality of self-aligned contact openings 140 .
- FIG. 3R depicts the product 100 after, in one illustrative embodiment, an anisotropic etching process was performed through the self-aligned contact openings 140 to remove the substantially horizontally oriented portions of the silicon dioxide etch stop layer 116 within the openings 140 while substantially leaving the remaining vertically oriented portions of the etch stop layer 116 , thereby exposing a portion of the upper surface of the source/drain region, e.g., in this example, a portion of the upper surface 114 X of the epi material 114 .
- an isotropic etch process may be performed in lieu of an anisotropic etching process.
- the etch stop layer 116 If performed, such an isotropic etching process would remove all of the etch stop layer 116 and perhaps consume some amount of the layer 128 and the gate cap layers 126 A. However, given the relative small thickness of the etch stop layer 116 , the consumption of the layer 128 and the gate cap layers 126 A would be relatively limited. If an isotropic etching process were to be performed, it would expose more of the upper surface of the source/drain region, thereby ultimately reducing contact resistance. As noted above, the epi material 114 need not be formed in all applications where the presently disclosed inventions may be used.
- FIG. 3S depicts the product 100 after several process operations were performed to form a conductive source/drain contact structure 142 for each of the source/drain regions of the product 100 .
- Gate contact structures (not shown) that are conductively coupled to each of the replacement gate structures 124 may also be formed as part of these process operations.
- the source/drain contact structures 142 may be of any desired cross-sectional configuration when viewed from above, e.g., square, rectangular, round, line-type, etc.
- the source/drain contact structures 142 are intended to be schematic and representative in nature, as they may be formed using any of a variety of different conductive materials and by performing traditional manufacturing operations.
- the contact structures 142 may also contain one or more barrier layers (not depicted).
- the contact structures 142 may be formed by depositing a liner, e.g., Ti, TiN, followed by overfilling the contact openings with a conductive material, such as tungsten or cobalt. Thereafter, a CMP process may be performed to planarize the upper surface of the layer of insulating material 128 , which results in the removal of excess portions of the liner and the tungsten (or cobalt) positioned above the layer of insulating material 128 outside of the contact openings 140 and the formation of the contact structures 142 .
- a liner e.g., Ti, TiN
- a CMP process may be performed to planarize the upper surface of the layer of insulating material 128 , which results in the removal of excess portions of the liner and the tungsten (or cobalt) positioned above the layer of insulating material 128 outside of the contact openings 140 and the formation of the contact structures 142 .
- One advantage of the presently disclosed subject matter lies in the fact that the process of forming the self-aligned contact openings 140 (see FIG. 3Q ) involves performing an etching process to selectively remove silicon nitride material (the layer 118 ) relative to silicon dioxide materials (layer 128 , the gate cap layer 126 A, the layer 120 and the etch stop layer 116 ). Removing silicon nitride relative to silicon dioxide is much easier than removing silicon dioxide relative to silicon nitride due to the stronger bonds in silicon dioxide material as compared to silicon nitride material.
- the formation of the self-aligned contact openings 140 is easier to accomplish and it can be accomplished more quickly than was the case with typical prior art processing techniques wherein silicon dioxide material was positioned in the space between the gate structures, the transistor had a silicon nitride gate cap layer and a silicon nitride etch stop layer was formed above the source/drain regions.
- FIGS. 4A-4I depict another illustrative method disclosed herein for forming self-aligned device level contact structures on integrated circuit products.
- FIG. 4A depicts the product 100 at a point in fabrication that corresponds to that shown in FIG. 3L , i.e., after the spacers 108 were recessed.
- FIGS. 4B-4C depict the product 100 after several processing operations were performed.
- a layer of insulating material 144 e.g., silicon dioxide
- the layer of insulating material 144 fills the space that was previously formed above the recessed surface 108 R of the sidewall spacers 108 (see, FIG. 4A ) and also re-covers the previously exposed upper sidewall surface portions of the gate cap layer 126 A and of the substantially vertically oriented portions of the etch stop layer 116 (see, FIG. 4A ).
- one or more planarization processes e.g., CMP
- CMP planarization processes
- the one or more CMP processes remove an upper portion of the gate cap layers 126 A, an upper part of the substantially vertically oriented portions of the etch stop layer 116 , and the portions of the layer of insulating material 120 remaining above the silicon nitride material 118 .
- portions of the layer of insulating material 144 remain in the space formed above the recessed upper surface 108 R of the sidewall spacers 108 , which may thereby serve as a spacer cap layer.
- FIG. 4D depicts the product 100 after several processing operations were performed.
- a thin layer of silicon nitride 150 e.g., 2-5 nm
- another layer of insulating material 152 e.g., silicon dioxide
- a hard mask layer 154 e.g., silicon nitride was formed above the layer of insulating material 152 .
- the material layers 150 , 152 may be formed to any desired thickness and all of the layers 150 , 152 and 154 may be formed using traditional manufacturing techniques.
- the pitch of the gate structures 124 is such that the final pattern for the contact openings will be defined in the hard mask layer 154 by performing two separate masking and etching processes, just like the process described above for the hard mask layer 130 . Accordingly, FIG. 4E depicts the product 100 after multiple etching processes were performed to define a patterned hard mask layer 154 X having openings corresponding to the contact openings 140 for the self-aligned contacts.
- FIG. 4F depicts the product 100 after an etching process was performed to remove the exposed portions of the silicon dioxide material layer 152 not covered by the patterned hard mask layer 154 X. This etching process stops on the silicon nitride layer 150 .
- FIG. 4G depicts the product 100 after an etching process was performed to remove the exposed silicon nitride material layer 150 and the silicon nitride material layer 118 above the silicon dioxide etch stop layer 116 that is positioned on the upper surface of the source/drain regions 113 , thus exposing both the remaining substantially horizontally and vertically oriented portions of the etch stop layer 116 .
- the patterned hard mask layer 154 X is also etched away. This results in the formation of a plurality of self-aligned contact openings 140 .
- FIG. 4H depicts the product 100 after an anisotropic etching process was performed through the self-aligned contact openings 140 to remove the substantially horizontally oriented portions of the silicon dioxide etch stop layer 116 within the openings 140 while substantially leaving the remaining vertically oriented portions of the etch stop layer 116 , thereby exposing a portion of the upper surface of the source/drain region, e.g., in this example, a portion of the upper surface 114 X of the epi material 114 .
- the epi material 114 need not be formed in all applications where the presently disclosed inventions may be used.
- FIG. 4I depicts the product 100 after the formation of the above-described conductive source/drain contact structures 142 for each of the source/drain regions of the product 100 .
- this embodiment also involves selectively removing silicon nitride materials relative to silicon dioxide materials to thereby form the self-aligned contact openings 140 which provide significant benefits relative to prior art processing methods.
Abstract
Description
- 1. Field of the Disclosure
- The present disclosure generally relates to integrated circuit products, and more particularly, to integrated circuit products having self-aligned device level contact structures.
- 2. Description of the Related Art
- In modern integrated circuits, such as microprocessors, storage devices and the like, a very large number of circuit elements, especially field effect transistors (FETs), are provided and operated on a restricted chip area. FETs come in a variety of different configurations, e.g., planar devices, FinFET devices, nanowire devices, etc. These FET devices are typically operated in a switched mode, that is, these devices exhibit a highly conductive state (on-state) and a high impedance state (off-state). The state of the field effect transistor is controlled by a gate electrode, which controls, upon application of an appropriate control voltage, the conductivity of a channel region formed between a drain region and a source region. The gate structures for such transistor devices may be manufactured using so-called “gate-first” or “replacement gate” (gate-last) manufacturing techniques.
- To improve the operating speed of FETs, and to increase the density of FETs on an integrated circuit device, device designers have greatly reduced the physical size of FETs over the years. More specifically, the channel length of FETs has been significantly decreased, which has resulted in improving the switching speed of FETs. However, decreasing the channel length of a FET also decreases the distance between the source region and the drain region. In some cases, this decrease in the separation between the source and the drain makes it difficult to efficiently inhibit the electrical potential of the source region and the channel from being adversely affected by the electrical potential of the drain. This is sometimes referred to as a so-called short channel effect, wherein the characteristic of the FET as an active switch is degraded. In contrast to a planar transistor device, which as the name implies has a generally planar structure, a so-called FinFET device has a three-dimensional (3D) structure. That is, the gate structure of a FinFET device may be positioned around both the sides and the upper surface of a portion of a fin that was previously defined in the substrate to thereby form a tri-gate structure so as to use a channel having a three-dimensional structure instead of a planar structure. That is, unlike a planar FET, in a FinFET device, a channel is formed perpendicular to a surface of the semiconducting substrate so as to reduce the physical size of the semiconductor device. Also, in a FinFET, the junction capacitance at the drain region of the device is greatly reduced, which tends to significantly reduce short channel effects. For a given plot space (or foot-print), FinFETs tend to be able to generate significantly higher drive current density than planar transistor devices.
- For many early device technology generations, the gate structures of most transistor elements (planar or FinFET devices) were comprised of a plurality of silicon-based materials, such as a silicon dioxide and/or silicon oxynitride gate insulation layer, in combination with a polysilicon gate electrode and a silicon nitride gate cap layer. However, as the channel length of aggressively scaled transistor elements has become increasingly smaller, many newer generation devices employ gate structures that contain alternative materials in an effort to avoid the short channel effects which may be associated with the use of traditional silicon-based materials in reduced channel length transistors. For example, in some aggressively scaled transistor elements, which may have channel lengths on the order of approximately 10-32 nm or less, gate structures that include a so-called high-k dielectric gate insulation layer and one or more metal layers that function as the gate electrode (HK/MG) have been implemented. Such alternative gate structures have been shown to provide significantly enhanced operational characteristics over the heretofore more traditional silicon dioxide/polysilicon gate structure configurations.
- One well-known processing method that has been used for forming a transistor with a high-k/metal gate structure is the so-called “gate last” or “replacement gate” technique. The replacement gate process may be used when forming planar devices or 3D devices.
FIGS. 1A-1E simplistically depict one illustrative prior art method for forming an HK/MG replacement gate structure using a replacement gate technique on a planar transistor device. As shown inFIG. 1A , the process includes the formation of a basic transistor structure above asemiconducting substrate 12 in an active area defined by a shallowtrench isolation structure 13. At the point of fabrication depicted inFIG. 1A , thedevice 10 includes a sacrificialgate insulation layer 14, a dummy orsacrificial gate electrode 15, asidewall spacer 16, a layer ofinsulating material 17 and source/drain regions 18 formed in thesubstrate 12. - The various components and structures of the
device 10 may be formed using a variety of different materials and by performing a variety of known techniques. For example, the sacrificialgate insulation layer 14 may be comprised of silicon dioxide, thesacrificial gate electrode 15 may be comprised of polysilicon or amorphous silicon, thesidewall spacer 16 may be comprised of silicon nitride and the layer ofinsulating material 17 may be comprised of silicon dioxide. The source/drain regions 18 may be comprised of implanted dopant materials (N-type dopants for NMOS devices and P-type dopants for PMOS devices) that are implanted into thesubstrate 12 using known masking and ion implantation techniques. Of course, those skilled in the art will recognize that there are other features of thetransistor 10 that are not depicted in the drawings for purposes of clarity. For example, so-called halo implant regions are not depicted in the drawings, as well as various layers or regions of silicon/germanium that are typically found in high performance PMOS transistors. At the point of fabrication depicted inFIG. 1A , the various structures of thedevice 10 have been formed and a chemical mechanical polishing (CMP) process has been performed to remove any materials above the sacrificial gate electrode 15 (such as a protective gate cap layer (not shown) comprised of silicon nitride) so that at least thesacrificial gate electrode 15 may be removed. -
FIG. 1B depicts thedevice 10 after one or more etching processes were performed to remove thesacrificial gate electrode 15 and the sacrificialgate insulation layer 14 to thereby define agate cavity 20 where a replacement gate structure will subsequently be formed. In a typical processing sequence, the sacrificialgate insulation layer 14 is removed as part of the replacement gate technique, as depicted herein. However, the sacrificialgate insulation layer 14 may not be removed in all applications. - Next, as shown in
FIG. 1C , various layers of material that will constitute areplacement gate structure 30 are formed in thegate cavity 20. Even in cases where the sacrificialgate insulation layer 14 is intentionally removed, there will typically be a very thin native oxide layer (not shown) that forms on thesubstrate 12 within thegate cavity 20. The materials used for thereplacement gate structures 30 for NMOS and PMOS devices are typically different. For example, thereplacement gate structure 30 for an NMOS device may be comprised of a high-kgate insulation layer 30A, such as hafnium oxide, afirst metal layer 30B (e.g., a layer of titanium nitride), asecond metal layer 30C—a so-called work function adjusting metal layer for the NMOS device—(e.g., a layer of titanium-aluminum or titanium-aluminum-carbon), athird metal layer 30D (e.g., a layer of titanium nitride) and abulk metal layer 30E, such as aluminum or tungsten. Of course, other material combinations are possible. - Ultimately, as shown in
FIG. 1D , one or more CMP processes are performed to remove excess portions of thegate insulation layer 30A, thefirst metal layer 30B, thesecond metal layer 30C, thethird metal layer 30D and thebulk metal layer 30E positioned outside of thegate cavity 20 to thereby define thereplacement gate structure 30 for an illustrative NMOS device. Typically, thereplacement gate structure 30 for a PMOS device does not include as many metal layers as does an NMOS device. For example, thegate structure 30 for a PMOS device may only include the high-kgate insulation layer 30A, a single layer of titanium nitride (the work function adjusting metal for the PMOS device) and thebulk metal layer 30E. -
FIG. 1E depicts thedevice 10 after several process operations were performed. First, one or more etching processes were performed to remove upper portions of the various materials within thegate cavity 20 so as to form a recess within thegate cavity 20. Then, agate cap layer 31 comprised of silicon nitride was formed in the recess above the recessed gate materials. Thegate cap layer 31 may be formed by depositing a layer of gate cap material so as to over-fill the recess formed in thegate cavity 20 and, thereafter, performing a CMP process to remove excess portions of the gate cap material layer positioned above the surface of the layer ofinsulating material 17. Thegate cap layer 31 is formed so as to protect the underlying gate materials during subsequent processing operations. - In the case of a gate-first process, the material(s) of the gate insulation layer are initially formed above the
substrate 12, typically by oxidation (silicon dioxide) or by deposition (a high-k insulating material). Thereafter, the material(s) that will constitute the gate electrode structure (e.g., polysilicon or one or more layers of metal) are deposited above the gate insulation layer. Thereafter, the material for the gate cap layer, e.g., silicon nitride, is deposited above the uppermost gate material layer. A patterned layer of photoresist is then formed above the layer of gate cap material and an etching process is performed to pattern the layer of gate cap material. The patterned layer of photoresist is then removed and the gate material(s) are patterned by performing one or more etching processes using the patterned gate cap layer as an etch mask. Thereafter, silicon nitride spacers are formed adjacent the patterned gate electrode structure which, in combination with the gate cap layer, serves to encapsulate and protect the gate electrode. - Over recent years, due to the reduced dimensions of the transistor devices, the operating speed of the circuit components has been increased with every new device generation, and the “packing density,” i.e., the number of transistor devices per unit area, in such products has also increased during that time. Such improvements in the performance of transistor devices has reached the point where one limiting factor relating to the operating speed of the final integrated circuit product is no longer the performance of the individual transistor elements but the electrical performance of the complex wiring system that is formed above the device level that includes the actual semiconductor-based circuit elements. Typically, due to the large number of circuit elements and the required complex layout of modern integrated circuits, the electrical connections of the individual circuit elements cannot be established within the same device level on which the circuit elements are manufactured, but require one or more additional metallization layers, which generally include metal-containing lines providing the intra-level electrical connection, and also include a plurality of inter-level connections or vertical connections, which are also referred to as vias. These vertical interconnect structures comprise an appropriate metal and provide the electrical connection of the various stacked metallization layers.
- Furthermore, in order to actually connect the circuit elements (e.g., transistors) formed in the semiconductor material with the metallization layers, an appropriate vertical device level contact structure is provided, a first end of which is connected to a respective contact region of a circuit element, such as a gate electrode and/or the drain and source regions of a transistor, and a second end that is connected to a respective metal line in the so-called M1 metallization layer by a conductive via. As device dimensions have decreased, the conductive device level contact elements have to be provided with critical dimensions on the same order of magnitude. The device level contact elements typically represent plugs or lines, which are formed of an appropriate metal or metal composition, wherein, in sophisticated semiconductor devices, tungsten, in combination with appropriate barrier materials, has proven to be a viable contact metal. For this reason, device level contact technologies have been developed in which contact openings are formed in a self-aligned manner by removing dielectric material, such as silicon dioxide, selectively from the spaces between closely spaced gate structures. That is, after completing the transistor structure, the silicon nitride materials (the
spacer 16 and the gate cap layer 31) that surround and encapsulate thegate electrode structures 30 are effectively used as etch masks for selectively removing the silicon dioxide material between adjacent gate structures in order to expose the source/drain regions of the transistors, thereby providing self-aligned trenches or openings which are substantially laterally delineated by thespacer structures 16 on adjacentgate electrode structures 30. - However, the aforementioned process of forming self-aligned contacts can result in an undesirable loss of the materials that protect the conductive gate electrode, i.e., the gate cap layer and/or the sidewall spacer, as will be explained with reference to
FIGS. 2A-2B .FIG. 2A schematically illustrates a cross-sectional view of anintegrated circuit product 40 at an advanced manufacturing stage. As illustrated, theproduct 40 comprises a plurality of illustrative and simplistically depictedgate structures 41 that are formed above asubstrate 42, such as a silicon substrate. Thegate structures 41 are comprised of an illustrativegate insulation layer 43 and anillustrative gate electrode 44 that are formed in agate cavity 45 using a gate-last or replacement-gate processing technique. An illustrativegate cap layer 46 and asidewall spacer 48 encapsulate and protect thegate structures 41. Thegate cap layer 46 and thesidewall spacer 48 are typically made of silicon nitride. Also depicted inFIG. 2A are a plurality of raised source/drain regions 50 and a layer of insulatingmaterial 52, e.g., silicon dioxide. -
FIG. 2B depicts theproduct 40 after a self-alignedcontact opening 54 was formed in the layer of insulatingmaterial 52 for a self-aligned contact through a patterned etch mask, e.g. photoresist (not shown). Depending upon the pitch of thegate structures 41, the formation of thecontact openings 54 may be done with a single etch mask layer or it may be done using two or more different etch masks. Although the contact etch process performed to form theopening 54 is primarily directed at removing the desired portions of the layer of insulating material 52 (e.g., silicon dioxide), portions of the protective gate cap layer 46 (silicon nitride) and the protective sidewall spacers 48 (silicon nitride) also get consumed during the contact etch process, as simplistically depicted in the dashedregions 56. Loss of protective material in theregion 56 can lead to exposure of the conductive gate electrode of thegate structure 41 and create an electrical short with the conductive device level contact that will be formed in thecontact opening 54. Such an electrical short can render the affected transistors inoperable for their intended purpose. - Given that the
cap layer 46 and thespacers 48 are attacked in the contact etch process, the thickness of these protective materials must be sufficient such that, even after the contact etch process is completed, there remains sufficient cap layer material and spacer material to protect thegate structures 41. Accordingly, device manufacturers tend to make the cap layers 46 andspacers 48 “extra thick,” i.e., with an additional thickness that may otherwise not be required but for the consumption of the cap layers 46 and thespacers 48 during the contact etch process. In turn, increasing the thickness of such structures, i.e., increasing the thickness of the gate cap layers 46, causes other problems, such as increasing the aspect ratio of thecontact opening 54 due to the increased height, increasing the initial gate height, which makes the gate etching and spacer etching processes more difficult, etc. - What is needed in the art is a novel process flow that addresses and corrects or lessens at least some of the problems identified above. Accordingly, the present disclosure is directed to various methods of forming self-aligned device level contact structures on integrated circuit products that may avoid, or at least reduce, the effects of one or more of the problems identified above.
- The following presents a simplified summary of the disclosure in order to provide a basic understanding of some aspects of the subject matter that is described in further detail below. This summary is not an exhaustive overview of the disclosure, nor is it intended to identify key or critical elements of the subject matter disclosed here. Its sole purpose is to present some concepts in a simplified form as a prelude to the more detailed description that is discussed later.
- Generally, the present disclosure is directed to integrated circuit products having self-aligned device level contact structures. One illustrative integrated circuit product disclosed herein includes two laterally spaced-apart transistors, wherein each of the two laterally spaced-apart transistors includes a gate structure, a gate cap layer positioned above the gate structure, and a sidewall spacer positioned adjacent to sidewalls of the gate structure. The disclosed integrated circuit product further includes, among other things, a source/drain region that is positioned between the two laterally spaced-apart transistors, a conformal etch stop layer that is positioned on and in contact with an upper surface of the source/drain region and on and in contact with a sidewall surface of the sidewall spacer of each of the two laterally spaced-apart transistors, and a self-aligned conductive contact that extends through an opening in the conformal etch stop layer and is conductively coupled to the source/drain region.
- In another exemplary embodiment of the present disclosure, an integrated circuit product includes two laterally spaced-apart transistors, wherein each of the two laterally spaced-apart transistors includes a gate structure, a silicon dioxide gate cap layer positioned above the gate structure, and a silicon nitride sidewall spacer positioned adjacent to sidewalls of the gate structure, wherein the silicon nitride spacer covers a lower sidewall surface portion of the gate cap layer. Each of the two laterally spaced-apart transistors also includes a silicon dioxide spacer cap layer positioned on and in contact with an upper surface of the silicon nitride sidewall spacer, wherein the silicon dioxide spacer cap layer covers an upper sidewall surface portion of the gate cap layer. The illustrative integrated circuit product further includes a layer of silicon dioxide insulating material positioned above each of the two laterally spaced-apart transistors, a source/drain region positioned between the two laterally spaced-apart transistors, and a conformal silicon dioxide etch stop layer that is positioned on and in contact with an upper surface of the source/drain region, on and in contact with a sidewall surface of the silicon nitride sidewall spacer of each of the two laterally spaced-apart transistors, and on and in contact with a sidewall surface of the silicon dioxide spacer cap layer of each of the two laterally spaced-apart transistors. Additionally, the disclosed integrated circuit product includes a self-aligned conductive contact positioned in an opening that extends through the layer of silicon dioxide insulating material and through the conformal silicon dioxide etch stop layer, wherein the self-aligned conductive contact is conductively coupled to the source/drain region.
- In yet a further illustrative embodiment, an exemplary integrated circuit product includes, among other things, two laterally spaced-apart transistors, wherein each of the two laterally spaced-apart transistors includes a gate structure, a silicon dioxide gate cap layer positioned above the gate structure, and a silicon nitride sidewall spacer positioned adjacent to sidewalls of the gate structure, wherein the silicon nitride spacer covers a lower sidewall surface portion of the gate cap layer. The disclosed integrated circuit product also includes a layer of silicon dioxide insulating material positioned above each of the two laterally spaced-apart transistors, a silicon nitride liner layer positioned between the layer of silicon dioxide insulating material and at least the silicon dioxide gate cap layer of each of the two laterally spaced-apart transistors, and a source/drain region positioned between the two laterally spaced-apart transistors. Additionally, the illustrative integrated circuit product further includes a conformal silicon dioxide etch stop layer that is positioned on and in contact with an upper surface of the source/drain region and on and in contact with a sidewall surface of the silicon nitride sidewall spacer of each of the two laterally spaced-apart transistors, as well as a self-aligned conductive contact positioned in an opening that extends through the layer of silicon dioxide insulating material, through the silicon nitride liner layer, and through the conformal silicon dioxide etch stop layer, wherein the self-aligned conductive contact is conductively coupled to the source/drain region.
- The disclosure may be understood by reference to the following description taken in conjunction with the accompanying drawings, in which like reference numerals identify like elements, and in which:
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FIGS. 1A-1E depict one illustrative prior art method of forming a gate structure of a transistor using a so-called “replacement gate” or “gate-last” manufacturing technique; -
FIGS. 2A-2B schematically illustrate a cross-sectional view of an illustrative prior art integrated circuit product that employs self-aligned contacts; -
FIGS. 3A-3S depict one illustrative method disclosed herein for forming self-aligned device level contact structures on integrated circuit products; and -
FIGS. 4A-4I depict another illustrative method disclosed herein for forming self-aligned device level contact structures on integrated circuit products. - While the subject matter disclosed herein is susceptible to various modifications and alternative forms, specific embodiments thereof have been shown by way of example in the drawings and are herein described in detail. It should be understood, however, that the description herein of specific embodiments is not intended to limit the claimed invention to the particular forms disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the claimed invention.
- Various illustrative embodiments of the present subject matter are described below. In the interest of clarity, not all features of an actual implementation are described in this specification. It will of course be appreciated that in the development of any such actual embodiment, numerous implementation-specific decisions must be made to achieve the developers' specific goals, such as compliance with system-related and business-related constraints, which will vary from one implementation to another. Moreover, it will be appreciated that such a development effort might be complex and time-consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the art having the benefit of this disclosure.
- The present subject matter will now be described with reference to the attached figures. Various systems, structures and devices are schematically depicted in the drawings for purposes of explanation only and so as to not obscure the present disclosure with details that are well known to those skilled in the art. Nevertheless, the attached drawings are included to describe and explain illustrative examples of the present disclosure. The words and phrases used herein should be understood and interpreted to have a meaning consistent with the understanding of those words and phrases by those skilled in the relevant art. No special definition of a term or phrase, i.e., a definition that is different from the ordinary and customary meaning as understood by those skilled in the art, is intended to be implied by consistent usage of the term or phrase herein. To the extent that a term or phrase is intended to have a special meaning, i.e., a meaning other than that understood by skilled artisans, such a special definition will be expressly set forth in the specification in a definitional manner that directly and unequivocally provides the special definition for the term or phrase.
- The present disclosure generally relates to various methods of forming self-aligned device level contact structures on integrated circuit products. The methods and devices disclosed herein may be employed in manufacturing products using a variety of technologies, e.g., NMOS, PMOS, CMOS, etc., and they may be employed in manufacturing a variety of different devices, e.g., memory products, logic products, ASICs, etc. As will be appreciated by those skilled in the art after a complete reading of the present application, the inventions disclosed herein may be employed in forming integrated circuit products using transistor devices in a variety of different configurations, e.g., planar devices, FinFET devices, nanowire devices, etc. The gate structures for such devices may be formed using either “gate first” or “replacement gate” manufacturing techniques. Thus, the presently disclosed inventions should not be considered to be limited to any particular form of transistors or the manner in which the gate structures of the transistor devices are formed. Of course, the inventions disclosed herein should not be considered to be limited to the illustrative examples depicted and described herein. With reference to the attached figures, various illustrative embodiments of the methods and devices disclosed herein will now be described in more detail. The various layers of material described below may be formed by any of a variety of different known techniques, e.g., a chemical vapor deposition (CVD) process, an atomic layer deposition (ALD) process, a thermal growth process, spin-coating techniques, etc. Moreover, as used herein and in the attached claims, the word “adjacent” is to be given a broad interpretation and should be interpreted to cover situations where one feature actually contacts another feature or is in close proximity to that other feature.
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FIGS. 3A-3S depict one illustrative method disclosed herein for forming self-aligned device level contact structures on integrated circuit products. Theillustrative product 100 will be formed in and above thesemiconductor substrate 102. Theproduct 100 may comprise either NMOS transistors, PMOS transistors or both types of transistors. Additionally, various doped regions, e.g., source/drain regions, halo implant regions, well regions and the like, are not depicted in the attached drawings. Thesubstrate 102 may have a variety of configurations, such as the depicted bulk silicon configuration. Thesubstrate 102 may also have a silicon-on-insulator (SOI) configuration that includes a bulk silicon layer, a buried insulation layer and an active layer, wherein semiconductor devices are formed in and above the active layer. Thesubstrate 102 may be made of silicon or it may be made of materials other than silicon. Thus, the terms “substrate” or “semiconductor substrate” should be understood to cover all semiconducting materials and all forms of such materials. - As noted above, the subject matter disclosed herein may be employed where the gate structures for the illustrative transistor devices may be formed using well-known “gate first” or “replacement gate” manufacturing techniques. In the example depicted in
FIGS. 3A-3S , the subject matter disclosed herein will be described in the context of using a replacement gate manufacturing technique. Accordingly,FIG. 3A depicts theproduct 100 at a point in fabrication wherein several process operations have been performed. First, a plurality ofillustrative gate structures 104 were formed above thesubstrate 102. Each of thegate structures 104 includes a schematically depictedsacrificial gate structure 106, asidewall spacer 108 and agate cap layer 110. Thesacrificial gate structure 106 typically includes a sacrificial gate insulation layer (not separately shown), such as silicon dioxide, and a dummy or sacrificial gate electrode (not separately shown), such as polysilicon or amorphous silicon. Thesidewall spacer 108 and thegate cap layer 110 are typically comprised of silicon nitride. Thegate structures 104 may be formed using well-known processing techniques. After thegate structures 104 were formed, anepi semiconductor material 114 was formed in the source/drain regions 113 of the transistor devices, thereby forming “raised” source/drain regions. As shown inFIG. 3A , the “raised”epi semiconductor material 114 covers a lower sidewall portion of thesidewall spacers 108, whereas the upper sidewall portion of thespacers 108 remain exposed. Theepi semiconductor material 114 need not be formed in all applications. The physical size of thegate structures 104 and the gate pitch for the gate structures may vary depending upon the particular application. -
FIG. 3B depicts theproduct 100 after anetch stop layer 116 was formed on theproduct 100 by performing a conformal deposition process. As shown inFIG. 3B , the conformaletch stop layer 116 is formed having substantially horizontally oriented portions covering an upper surface of the epi semiconductor material 114 (or the upper surface of thesubstrate 102 in the source/drain regions 113 in those embodiments wherein the epi semiconductor material 114) and upper surfaces of thesidewall spacers 108 and gate cap layers 108, as well as substantially vertically oriented portions covering the upper sidewall portions of thesidewall spacers 108 that extend above the epi semiconductor material 114 (or the entire outer sidewall surfaces of thespacers 108 when theepi semiconductor material 114 is not formed). In certain embodiments, theetch stop layer 116 may be comprised of a variety of materials, e.g., silicon dioxide, etc., and it may be formed by performing a conformal ALD or CVD process. The thickness of theetch stop layer 116 may vary depending upon the particular application, e.g., 3-6 nm. -
FIG. 3C depicts theproduct 100 after a layer ofmaterial 118 was formed on theproduct 100 by performing a conformal deposition process. The layer ofmaterial 118 may be comprised of a variety of materials, e.g., silicon nitride, etc., and it may be formed by performing a conformal ALD or CVD process. The thickness of the layer ofmaterial 118 may vary depending upon the particular application, e.g., 20-30 nm. Given the pitch between thegate structures 104, the layer ofmaterial 118 will typically “pinch-off” in the space betweenadjacent gate structures 104 above the source/drain regions 113 so as to substantially fill the space betweenadjacent gate structures 104. Of course, some voids may be present in thematerial 118 positioned betweenadjacent gate structures 104. -
FIG. 3D depicts theproduct 100 after a timed, recess etching process was performed on the layer ofmaterial 118. After the etching process, the recessed layer of insulating material has a recessedupper surface 118R that is positioned at a level that is below a level of anupper surface 106X of thesacrificial gate structure 106, e.g., by a distance of about 2-10 nm. -
FIG. 3E depicts theproduct 100 after an illustrative layer of insulatingmaterial 120, e.g., silicon dioxide, was blanket deposited above theproduct 100. -
FIG. 3F depicts theproduct 100 after one or more planarization processes (e.g., CMP) were performed to remove a portion of the layer of insulatingmaterial 120 and the substantially horizontally oriented portions of theetch stop layer 116 that were formed above the upper surfaces of thesidewall spacers 108 and gate cap layers 108, thus leaving the substantially horizontally oriented portions of theetch stop layer 116 covering the upper surface of theepi semiconductor material 114 and the substantially vertically oriented portions covering the upper sidewall portions of thesidewall spacers 108. Furthermore, at the completion of the planarization process, the upper surfaces 110X of the gate cap layers 110 are exposed. -
FIG. 3G depicts theproduct 100 after one or more planarization processes (e.g., CMP) were performed to remove the gate cap layers 110 and portions of thesidewall spacers 108 so as to thereby expose theupper surface 106X of thesacrificial gate structure 106 for further processing, i.e., so that thesacrificial gate structure 106 can be removed. Also as shown inFIG. 3G , and upper part of the substantially vertically oriented portions of theetch stop layer 116 are removed along with the portions of thesidewall spacers 108. -
FIG. 3H depicts theproduct 100 after one or more wet or dry etching processes were performed to remove the sacrificial gate structures 106 (gate insulation layer plus gate electrode) to thereby define a plurality ofgate cavities 122 where replacement gate structures will subsequently be formed for theproduct 100. Typically, the sacrificial gate insulation layer (not separately shown) is removed as part of the replacement gate technique. Even in cases where the sacrificial gate insulation layer is intentionally removed, there may typically be a very thin native oxide layer (not shown) that forms on the surface of the substrate within thegate cavities 122. - The next major process sequence involves formation of the
replacement gate structures 124 for theproduct 100. Thereplacement gate structures 124 that will be depicted herein are intended to be representative in nature of any type of gate structure that may be employed in manufacturing integrated circuit products using so-called gate-last (replacement-gate) manufacturing techniques. Of course, as noted above, the presently disclosed inventions may be employed in situations where the gate structures for the transistor devices are formed using well-known gate first manufacturing techniques. In the context of an illustrative replacement gate process, with reference toFIG. 3I , a pre-clean process was performed in an attempt to remove all foreign materials from within thegate cavities 122 prior to forming the various layers of material that will become part of thereplacement gate structures 124. Next, a high-k (k value greater than 10)gate insulation layer 124A, such as hafnium oxide (or the other high-k materials), was deposited across thesubstrate 102 and within thegate cavities 122 by performing a conformal deposition process. - Thereafter, multiple conductive layers, such as metal layers, were sequentially deposited above the
substrate 102 and within thegate cavities 122 such that thegate cavities 122 were substantially overfilled with material. Then, one or more CMP processes were performed to remove excess materials positioned outside of thegate cavities 122. Next, one or more recess etching processes were performed to recess the materials within thegate cavities 122 so as to thereby make room for a gate cap layer. These process operations result in the definition of the illustrative and simplistically depictedreplacement gate structures 124B depicted inFIG. 3I . -
FIG. 3J depicts theproduct 100 after a layer of insulating material 126 (e.g., silicon dioxide) was formed above theproduct 100 using traditional deposition techniques. The layer of insulatingmaterial 126 over-fills the recess above thereplacement gate structures 124 within thegate cavities 122. -
FIG. 3K depicts theproduct 100 after one or more planarization processes (e.g., CMP) were performed on the layer of insulatingmaterial 126 such that the upper surface of the layer of insulatingmaterial 126 is substantially even with the upper surface of thespacers 108. This process operation results in a plurality of gate cap layers 126A positioned above thereplacement gate structures 124. Importantly, unlike traditional manufacturing techniques, in this embodiment, the method disclosed herein involves the formation ofgate cap layers 126A made of silicon dioxide as compared to traditional gate cap layers that are typically made of silicon nitride. As noted above, the present subject matter can be employed when forming self-aligned contacts on integrated circuit products wherein gate structures may be formed using so-called “gate-first” manufacturing techniques. - An analogous structure to that depicted in
FIG. 3K , wherein the transistors were made using gate first manufacturing techniques could be made as follows. Rather than forming the dummy orsacrificial gate structures 106, the materials for the gate insulation layer (silicon dioxide or a high k material), the gate electrode (polysilicon or metal layers) and a gate cap material (silicon dioxide) could be initially formed across thesubstrate 102. Thereafter, all of these materials could then be patterned so as to define a basic gate structure with a silicon dioxide gate cap layer on top of the gate electrode. Sidewall spacers 108 (e.g., silicon nitride) could then be formed adjacent each of the gate structures. Theetch stop layer 116 and thesilicon nitride layer 118 could then be formed as shown inFIGS. 3C-3D . At that point, processing would continue with the formation of the layer 120 (FIG. 3E ) and polishing that would stop on thenitride spacers 108. These steps would result in the structure depicted inFIG. 3K but the gates would be manufactured using a gate first manufacturing technique. -
FIG. 3L depicts theproduct 100 after a timed, spacer recess etching process was performed to reduce the height of thesidewall spacers 108 such that they have anupper surface 108R that is recessed relative to thegate cap layers 126A and the substantially vertically oriented portions of theetch stop layer 116. As shown inFIG. 3L , after completion of the timed spacer recess etching process, upper sidewall surface portions of thegate cap layer 126A and of the substantially vertically oriented portions of theetch stop layer 116 are exposed above the recessedupper surface 108R of thesidewall spacers 108. The spacer recess etching process is performed for such a duration that the recessedsurface 108R of thespacers 108 is positioned at a level that is above a level of theupper surface 124X of thereplacement gate structures 124, e.g., by a distance of about 3-5 nm. -
FIG. 3M depicts theproduct 100 after several processing operations were performed. First, another layer of insulating material 128 (e.g., silicon dioxide) was formed above theproduct 100 using traditional deposition techniques. As shown inFIG. 3M , the layer of insulatingmaterial 128 fills the space that was previously formed above the recessedsurface 108R of the sidewall spacers 108 (see,FIG. 3L ) and also re-covers the previously exposed upper sidewall surface portions of thegate cap layer 126A and of the substantially vertically oriented portions of the etch stop layer 116 (see,FIG. 3L ). Thereafter, ahard mask layer 130, e.g., silicon nitride was formed above the layer of insulatingmaterial 128. The material layers 128, 130 may be formed to any desired thickness. - In the example depicted herein, the pitch of the
gate structures 124 is such that the final pattern for the contact openings will be defined in thehard mask layer 130 by performing two separate masking and etching processes. Of course, in some applications, the final pattern for the contact openings may be defined in thehard mask layer 130 by performing a single masking and etching process. Accordingly,FIG. 3N depicts theproduct 100 after a first plurality ofopenings 130A were defined in thehard mask layer 130 by performing an etching process through a first patterned photoresist mask (not shown), and after the first photoresist mask was stripped.FIG. 3O depicts theproduct 100 after a second plurality ofopenings 130B were defined in thehard mask layer 130 by performing an etching process through a second patterned photoresist mask (not shown), and after the second photoresist mask was stripped. These process operations result in the formation of a patternedhard mask layer 130X having openings corresponding to the contact openings for the self-aligned contacts. -
FIG. 3P depicts theproduct 100 after an etching process was performed to remove the exposed portions of the silicon dioxide materials (layers hard mask layer 130X. The duration of this etching process is such that it is stopped when theupper surface 118R of thesilicon nitride material 118 is exposed. As shown inFIG. 3P , portions of the layer of insulatingmaterial 128 remain in the space formed above the recessedupper surface 108R of thesidewall spacers 108, which may thereby serve as a spacer cap layer. -
FIG. 3Q depicts theproduct 100 after an etching process was performed to remove the exposedsilicon nitride material 118 above the silicon dioxideetch stop layer 116 that is positioned on the upper surface of the source/drain region 113, thus exposing both the remaining substantially horizontally and vertically oriented portions of theetch stop layer 116. Note that during this etching process, the patternedhard mask layer 130X is also etched away. These operations result in the formation of a plurality of self-alignedcontact openings 140. -
FIG. 3R depicts theproduct 100 after, in one illustrative embodiment, an anisotropic etching process was performed through the self-alignedcontact openings 140 to remove the substantially horizontally oriented portions of the silicon dioxideetch stop layer 116 within theopenings 140 while substantially leaving the remaining vertically oriented portions of theetch stop layer 116, thereby exposing a portion of the upper surface of the source/drain region, e.g., in this example, a portion of theupper surface 114X of theepi material 114. In another illustrative embodiment, an isotropic etch process may be performed in lieu of an anisotropic etching process. If performed, such an isotropic etching process would remove all of theetch stop layer 116 and perhaps consume some amount of thelayer 128 and the gate cap layers 126A. However, given the relative small thickness of theetch stop layer 116, the consumption of thelayer 128 and the gate cap layers 126A would be relatively limited. If an isotropic etching process were to be performed, it would expose more of the upper surface of the source/drain region, thereby ultimately reducing contact resistance. As noted above, theepi material 114 need not be formed in all applications where the presently disclosed inventions may be used. -
FIG. 3S depicts theproduct 100 after several process operations were performed to form a conductive source/drain contact structure 142 for each of the source/drain regions of theproduct 100. Gate contact structures (not shown) that are conductively coupled to each of thereplacement gate structures 124 may also be formed as part of these process operations. The source/drain contact structures 142 may be of any desired cross-sectional configuration when viewed from above, e.g., square, rectangular, round, line-type, etc. The source/drain contact structures 142 are intended to be schematic and representative in nature, as they may be formed using any of a variety of different conductive materials and by performing traditional manufacturing operations. Thecontact structures 142 may also contain one or more barrier layers (not depicted). In one illustrative example, thecontact structures 142 may be formed by depositing a liner, e.g., Ti, TiN, followed by overfilling the contact openings with a conductive material, such as tungsten or cobalt. Thereafter, a CMP process may be performed to planarize the upper surface of the layer of insulatingmaterial 128, which results in the removal of excess portions of the liner and the tungsten (or cobalt) positioned above the layer of insulatingmaterial 128 outside of thecontact openings 140 and the formation of thecontact structures 142. - One advantage of the presently disclosed subject matter lies in the fact that the process of forming the self-aligned contact openings 140 (see
FIG. 3Q ) involves performing an etching process to selectively remove silicon nitride material (the layer 118) relative to silicon dioxide materials (layer 128, thegate cap layer 126A, thelayer 120 and the etch stop layer 116). Removing silicon nitride relative to silicon dioxide is much easier than removing silicon dioxide relative to silicon nitride due to the stronger bonds in silicon dioxide material as compared to silicon nitride material. Thus, by using thesilicon nitride material 118 in the space between the gate structures (above the source/drain regions), the silicon dioxidegate cap layer 126A and the silicon dioxideetch stop layer 116, the formation of the self-alignedcontact openings 140 is easier to accomplish and it can be accomplished more quickly than was the case with typical prior art processing techniques wherein silicon dioxide material was positioned in the space between the gate structures, the transistor had a silicon nitride gate cap layer and a silicon nitride etch stop layer was formed above the source/drain regions. -
FIGS. 4A-4I depict another illustrative method disclosed herein for forming self-aligned device level contact structures on integrated circuit products.FIG. 4A depicts theproduct 100 at a point in fabrication that corresponds to that shown inFIG. 3L , i.e., after thespacers 108 were recessed. -
FIGS. 4B-4C depict theproduct 100 after several processing operations were performed. First, a layer of insulating material 144 (e.g., silicon dioxide) was formed above theproduct 100 using traditional deposition techniques. As shown inFIG. 4B , the layer of insulatingmaterial 144 fills the space that was previously formed above the recessedsurface 108R of the sidewall spacers 108 (see,FIG. 4A ) and also re-covers the previously exposed upper sidewall surface portions of thegate cap layer 126A and of the substantially vertically oriented portions of the etch stop layer 116 (see,FIG. 4A ). Then, one or more planarization processes (e.g., CMP) were performed that ultimately stop on the recessedupper surface 118R of the silicon nitride material layer 118 (as shown inFIG. 4C ), thereby exposing thesilicon nitride material 118 for further processing. As depicted in the sequence shown inFIGS. 4B-4C , the one or more CMP processes remove an upper portion of the gate cap layers 126A, an upper part of the substantially vertically oriented portions of theetch stop layer 116, and the portions of the layer of insulatingmaterial 120 remaining above thesilicon nitride material 118. Additionally, portions of the layer of insulatingmaterial 144 remain in the space formed above the recessedupper surface 108R of thesidewall spacers 108, which may thereby serve as a spacer cap layer. -
FIG. 4D depicts theproduct 100 after several processing operations were performed. First, a thin layer of silicon nitride 150 (e.g., 2-5 nm) was formed on theproduct 100. Then, another layer of insulating material 152 (e.g., silicon dioxide) was formed on the thin layer ofsilicon nitride 150. Then, ahard mask layer 154, e.g., silicon nitride was formed above the layer of insulatingmaterial 152. The material layers 150, 152 may be formed to any desired thickness and all of thelayers - As noted above, in the example depicted herein, the pitch of the
gate structures 124 is such that the final pattern for the contact openings will be defined in thehard mask layer 154 by performing two separate masking and etching processes, just like the process described above for thehard mask layer 130. Accordingly,FIG. 4E depicts theproduct 100 after multiple etching processes were performed to define a patternedhard mask layer 154X having openings corresponding to thecontact openings 140 for the self-aligned contacts. -
FIG. 4F depicts theproduct 100 after an etching process was performed to remove the exposed portions of the silicondioxide material layer 152 not covered by the patternedhard mask layer 154X. This etching process stops on thesilicon nitride layer 150. -
FIG. 4G depicts theproduct 100 after an etching process was performed to remove the exposed siliconnitride material layer 150 and the siliconnitride material layer 118 above the silicon dioxideetch stop layer 116 that is positioned on the upper surface of the source/drain regions 113, thus exposing both the remaining substantially horizontally and vertically oriented portions of theetch stop layer 116. Note that, during this etching process, the patternedhard mask layer 154X is also etched away. This results in the formation of a plurality of self-alignedcontact openings 140. -
FIG. 4H depicts theproduct 100 after an anisotropic etching process was performed through the self-alignedcontact openings 140 to remove the substantially horizontally oriented portions of the silicon dioxideetch stop layer 116 within theopenings 140 while substantially leaving the remaining vertically oriented portions of theetch stop layer 116, thereby exposing a portion of the upper surface of the source/drain region, e.g., in this example, a portion of theupper surface 114X of theepi material 114. As noted above, theepi material 114 need not be formed in all applications where the presently disclosed inventions may be used. -
FIG. 4I depicts theproduct 100 after the formation of the above-described conductive source/drain contact structures 142 for each of the source/drain regions of theproduct 100. As with the previous embodiment, this embodiment also involves selectively removing silicon nitride materials relative to silicon dioxide materials to thereby form the self-alignedcontact openings 140 which provide significant benefits relative to prior art processing methods. - The particular embodiments disclosed above are illustrative only, as the claimed invention may be modified and practiced in different but equivalent manners apparent to those skilled in the art having the benefit of the teachings herein. Furthermore, no limitations are intended to the details of construction or design herein shown, other than as described in the claims below. It is therefore evident that the particular embodiments disclosed above may be altered or modified and all such variations are considered within the scope and spirit of the claimed invention. Note that the use of terms, such as “first,” “second,” “third” or “fourth” to describe various structures in this specification and in the attached claims is only used as a shorthand reference to such structures and does not necessarily imply that such structures are formed in that ordered sequence. Accordingly, the protection sought herein is as set forth in the claims below.
Claims (20)
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US15/470,006 US20170207122A1 (en) | 2015-08-10 | 2017-03-27 | Self-aligned device level contact structures |
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US14/822,340 US9653356B2 (en) | 2015-08-10 | 2015-08-10 | Methods of forming self-aligned device level contact structures |
US15/470,006 US20170207122A1 (en) | 2015-08-10 | 2017-03-27 | Self-aligned device level contact structures |
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US14/822,340 Division US9653356B2 (en) | 2015-08-10 | 2015-08-10 | Methods of forming self-aligned device level contact structures |
Publications (1)
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Family
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US14/822,340 Active US9653356B2 (en) | 2015-08-10 | 2015-08-10 | Methods of forming self-aligned device level contact structures |
US15/470,006 Abandoned US20170207122A1 (en) | 2015-08-10 | 2017-03-27 | Self-aligned device level contact structures |
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US20180166336A1 (en) * | 2016-07-21 | 2018-06-14 | International Business Machines Corporation | Self-aligned contact cap |
CN109411537A (en) * | 2017-08-16 | 2019-03-01 | 格芯公司 | Composite contact etching stopping layer |
US10529859B2 (en) | 2017-11-10 | 2020-01-07 | Samsung Electronics Co., Ltd. | Multi-channel transistor including an asymmetrical source/drain contact |
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