DE19922082B4 - Device geometry-independent device for testing electronic components with displaceable contact means - Google Patents

Abstract

contraption for testing the electrical performance of electronic Components (1), in particular of integrated circuits, with at least an electrically conductive connecting element (3), which on the one hand directly or indirectly with an electrical test device (4) for examination the electrical functionality of electronic components (1) electrically connected is and on the other hand with at least one contact means (5) indirectly or directly electrically conductively connected or in electrically conductive connection can be brought, wherein the electronic to be tested Component (1) to the connecting element (3) opposite Side of the contact means (5) to produce an electrically conductive Contacting be approached is, characterized in that the contact means (5) a substantially film, foil, strip, sheet or sheetlike Structure has, in the perpendicular to the contact surface aligned contacting direction at least somewhat elastic or inelastic, in the contacting direction electrically conductive and at right angles to the contact direction electrically is insulating, wherein the contact means (5) on the one hand, or the Connecting element (3) together with the electronic component (1) in solid ...

Description

The The present invention relates to an apparatus for testing the electrics Funktionsfähigkait of electronic components also of different geometry, in particular of integrated circuits, with those in the preamble of the claim 1 specified characteristics.

It is a device for testing the electrical functionality of electronic components in which the test to be tested electronic component during of the test procedure is to be inserted into a contact socket.

These Test device with contact base has the one hand the disadvantage on that for every different embodiment an electronic device to be tested a separate, to the respective embodiment of the electronic component to be tested customized Contact socket is to use, the initial cost is high.

There the use of such a contact socket usually is about 50,000 test cycles, results in a fairly short life, so that the contact socket is common to renew, resulting in an increase in the cost of testing.

by virtue of the high speed of innovation in electronic components These contact bases are usually not prefabricated in stock held, but must sen can be customized after receipt of order, resulting in because of frequent long delivery delays in the Production process.

The Installing a new contact socket in the test device is about that In addition, time-consuming and requires a long-term and tedious assembly and orientation, as well as time-consuming checking of the contact socket.

Out The prior art also includes an electronic device for testing Components known in which a fixed elastomeric film with integrated wires as a contact for the transfer of signals between the electronic device to be tested and the test socket serves.

In usually there are pronounced oxide layers and / or flux layers on the contacts of the electronic components to be tested. During the Contacting process between the film-shaped contact means and the contacts The electronic components always lead to a deposit the oxide layers and / or the flux layers on the foil-shaped contact element. The same applies to the contact surfaces a contact socket.

These deposits that accumulate with each contacting process in particular the devices known from the prior art to the serious disadvantage of an ever-changing and possibly severely restricted electrical conductivity.

Just with considerable cleaning effort as well as loss-making Standstill of the entire test device succeeds in this oxide and / or flux layers to remove at least to some extent.

by virtue of the bad contact caused by the soiled contact points contacting quality Many electrically faultless components are mistaken as sorted out incorrectly. With expensive electronic components makes the reduced yield of perfect components especially disadvantageous noticeable.

The because of the permanent structure of the oxide and / or flux layer constantly fluctuating electrical conductivity the contact agent also causes a very low measurement reliability. Costly and time consuming re-measurements and an unnecessarily high Committee electrically faultless components are the result.

As soon as in particular, the film-shaped, large-area contact means through the deposited oxide and / or flux layers in the contact area is dirty, is the replacement by a new large-scale, foil-shaped Contact agent displayed.

The A device known from the prior art for testing electronic Components with a foil-shaped Contact element therefore has the disadvantage that they are the Use of large areas expensive, foil-shaped Contact elements requires, although a large part of the respective film-shaped contact element, For example, the edge area or between the component contacts lying area, is still unused.

especially already known from the prior art foil-shaped contact element after a small number of contacts due to deposition of oxide and / or flux layers and / or due to wear of the Elastomer material is in need of renewal, it comes only one very short life and service life too.

The invention with which the above erläuter ten disadvantages are to be avoided, starts from one US 544 388 A known device for testing electronic components, which has the features listed in the preamble of claim 1.

The known device comprises a bottom contact socket, on which an electrically insulating s foil tape rests. In This electrically insulating film strip are in exact geometric Correspondence to the contacts of the underlying contact socket incorporated plate-like contact elements.

Around to ensure, that the contacts of the contact socket on the one hand and the plate-shaped contact elements the insulating film strip on the other hand exactly aligned one above the other lie, the insulating foil tape has positioning holes, in which on the contact socket upstanding positioning pins centered intervention.

As soon as the plate-shaped Contact elements of the insulating foil tape exactly over the contacts of the contact socket are placed in position and the socket side Positioning pins below the corresponding positioning holes of the Insulating foil tape lie, is the entire winding mechanism lowered the insulating foil tape including the drive as far down, until the insulating foil tape rests on the contact socket and the Center the positioning pins in the positioning holes.

First then can over an example by means of a cylinder vertically movable Pressure device from above one required for the functional test Contact pressure on the exact above the plate-shaped Contact elements of the insulating foil tape lying, leg-shaped contacts of the chip under test become.

Of the The main disadvantage of this device is that because of the required centering through the positioning holes in Interaction with the socket-side positioning pins only a wasteful stepwise shifting of the insulating foil tape with a very big one Step size of more than a full component width is possible.

A full and full-surface Utilization of the total area of the insulating film strip is therefore not possible.

adversely is in the case of this device further that in dependence the number and arrangement of the contacts of the chip under test in the insulating film strip with very high production costs exactly aligned, corresponding plate-shaped contact elements incorporated Need to become.

From Disadvantage is also that also with a high production cost, the positioning holes for Engage the socket-side positioning pins in the insulating film strip with extremely pronounced requirements must be provided for the accuracy of the placement.

Finally is This device also disadvantageous because of a shift the soiled insulating foil tape numerous process steps are required, which is a disturbing Interruption of the test procedure and thus a reduction of the throughput have as a consequence.

Of the present invention is based on this prior art the task is based on a device for testing the electrical operability to provide electronic components with a band-shaped contact means; Which economic operation allowed, quick and easy Moving the contact means substantially without interruption the test procedure allows easy and inexpensive is to manufacture and in which no centering of the band-shaped contact means necessary is.

According to the invention this Task in a generic device by the specified in the characterizing part of claim 1 Characteristics solved.

Especially preferred embodiments are Subject of the dependent claims.

embodiments The invention will be described in more detail with reference to the drawings. Show it:

1 a schematic perspective view of a device according to the invention for testing the electrical performance of electronic components obliquely from above left with a wound on a cassette-shaped unwinding and retracting, transportable and band-shaped contact means;

2 a schematic cross-section through an inventively used contact means with integrated, extending in the contact direction, wire-shaped conductors;

3 a schematic cross section through a contact mitmit used in accordance with the invention tel with integrated therein, obliquely to the contact direction extending, wire-shaped conductors;

4 a schematic cross section through a contact means used according to the invention with therein at least partially integrated, extending in the contact direction, wire-shaped conductors;

5 a schematic, perspective rear view of a cassette for roll-up and / or roll-off support and storage of a band-shaped contact means;

6 a schematic, perspective frontwärtige view of a cassette for up and / or unrolling and storage of a substantially band-shaped contact means, in which on the waves of the cassette, a gaseous medium is supplied or removed, which at least partially and on the band-shaped contact means and one or swept over on both sides and thus brings to a preset temperature;

7 a schematic, perspective view of a device according to the invention for testing the electrical functionality of electronic components obliquely from above left with a wound on a unwinding and retracting, transportable and band-shaped contact means.

As in particular from 1 shows, the device according to the invention for testing the electrical functionality of electronic components ( 1 ), in particular of integrated circuits, at least one electrically conductive connection element ( 3 ).

As a rule, the component to be tested ( 1 ) facing away from the rear side and / or the edge region of this connecting element ( 3 ) directly or indirectly with an electrical test device ( 4 ) for testing the electrical functioning of electronic components ( 1 ) electrically conductively connected.

The opposite side of the connecting element ( 3 ), ie the component to be tested ( 1 ) facing side, is preferably at least one contact means ( 5 ) indirectly or directly electrically conductively connected or can hereby-for example, by pressing by means of the electronic device to be tested ( 1 ) - be electrically connected.

To carry out the test procedure, the electronic component to be tested ( 1 ) to the connecting element ( 3 ) opposite side of the contact agent ( 5 ) while providing an electrically conductive connection between the electronic component ( 1 ), the contact 5 ) and the connecting element ( 3 ). Alternatively, it is possible, the connecting element ( 3 ) together with the contact agent ( 5 ) while providing an electrically conductive connection to the optionally fixed electronic component ( 1 ) introduce.

As in particular from the 2 to 4 and 7 shows that the contact agent ( 5 ), for example, a substantially film, foil, strip, sheet, sheet or band-shaped construction.

In the contacting direction aligned perpendicular to the contact surface, the contact means ( 5 ) preferably at least somewhat elastic. Of course it is possible to use the contact agent ( 5 ) non-compliant in the aligned perpendicular to the contact surface contacting direction.

In an elastic embodiment of the contact agent ( 5 ) this goes after a deformation by the contacts of the electronic device to be tested ( 1 ) returns to its original state during the test process.

The contact agent ( 5 ) may have energy elasticity (steel elasticity) or entropy elasticity (rubber elasticity).

In preferred embodiments, the contact means ( 5 ) in the contacting direction chemically, physically or by incorporation of electrically conductive materials electrically conductive and perpendicular to the Kontaktierrichtung electrically insulating.

An essential feature of the device according to the invention for testing the electrical functionality of electronic components ( 1 ) is that preferably the contact means ( 5 ) is at least slightly displaceable in the direction of the z and / or x and / or y axis. Alternatively or additionally, it is possible, the connecting element ( 3 ) together with the electrical component ( 1 ) in fixed end relation to each other with respect to the contact means ( 5 ) to move.

The displacement of the contact agent ( 5 ) may, for example, be indirectly or directly coupled with the movement of the handling device ( 2 ) substantially to the exclusion of a reduction in the component throughput. Optionally, the displacement of the contact agent ( 5 ) during handling of the electronic component ( 1 ) and before and / or after the actual testing process.

Especially 1 shows that the invent a device for testing the electrical functionality of electronic components, at least one manual or automatic handling device ( 2 ) for the positioning of electronic components ( 1 ) in the x and / or y and / or z directions. In preferred embodiments, the handling device ( 2 ) itself in the x and / or y and / or z-direction movable.

In the contact means ( 5 ) can essentially be an electrically insulating, strip, sheet, strip, sheet or plate-like film which does not yield in the contacting direction ( 7 ) act.

In particularly preferred embodiments, this film is ( 7 ) but in the form of an elastomeric film.

The Elastomer may for example be selected from the group of silicones, Natural rubber, synthetic polyisoprene, rubber, acrylate rubber, Polyester urethane rubber, halogenated butyl rubber, polybutadiene, halogenated polyethylene, epichlorohydrin (homopolymer, Copoplymere), Pulychloropren, sulfurized polyethylene, ethylene-acrylate rubber, sulfur-crosslinked Ethylene-propylene terpolymer, peroxide cross-linked ethylene-propylene copolymer, polyether-urethane rubber, Ethylene-vinyl acetate copolymer, fluororubber, fluorosilicone rubber, hydrogenated nitrile rubber, butyl rubber, vinyl-containing dimethylpolysiloxane, Thioplasts, polyfluorophosphazenes, polynorbornene and styrene-butadiene rubber.

Preferably, in the foil or band-shaped contact means ( 5 ) a plurality of substantially wire-shaped conductors extending in the contacting direction ( 6 ) at least partially integrated.

4 shows that the ends of the wire-shaped conductors ( 6 ) the front and / or back of the contact agent ( 5 ) to ensure a particularly secure contact optionally at least slightly higher

As in particular from the 2 to 4 As can be seen, the substantially wire-shaped conductors ( 6 ) at right angles or obliquely to the surface of the contact agent ( 5 ) be aligned. The ladder ( 6 ) consist for example of a gold-plated wire and are usually only very slightly spaced from each other.

The contact agent ( 5 ) can, for example, substantially band-shaped and rewindable or rewindable in a removable cassette ( 8th ) or preferably on an unwinding and unwinding device at least partially integrated into the test device ( 9 ) (see in particular 1 . 6 and 7 ), whereby the cassette ( 8th ) usually only a support function for the contact means ( 5 ) exercises.

As in particular from 6 can be seen, the axes of rotation of the cassette ( 8th ) or the roll-up and roll-off device ( 9 ), for example by at least one (step) motor and / or manually be driven by rotation.

Since the test procedure of the electronic component ( 1 ) is carried out at exactly predetermined temperatures, in preferred embodiments, the contact means ( 5 ) and / or the cassette ( 8th ) and / or the unwinding and reeling device ( 9 ) directly or indirectly to a preset temperature by heating and / or cooling brought.

As insbeondere out 6 For this purpose, for example, a gaseous medium of the cassette brought to a preset temperature ( 8th ) are supplied via the axes of rotation and the gaseous medium via corresponding outlet openings on the front side and / or on the back of the contact means ( 5 ).

To ensure a constant temperature during many test cycles, it is possible to 8th ) and / or the reeling and unwinding device ( 9 ) directly or indirectly in the optionally box-shaped heat insulation ( 10 ) of the device according to the invention at least partially integrate or provide within this.

In general, the connecting element ( 3 ) on its electronic component to be tested ( 1 ) facing side in one or more electrically conductive connection elements in an arrangement which of the connection element arrangement of the electronic component to be tested ( 1 ) corresponds.

On the electronic component ( 1 ) facing away from the connecting element ( 3 ) or in its edge region, one or more electrically conductive connection elements for the direct or indirect connection of a test device ( 4 ) (see in particular 1 and 7 ).

As a rule, the test equipment ( 4 ) on the one hand to the device to be tested ( 1 ) via the connecting element ( 3 ) and the contact agent ( 5 ) directed input signals. On the other hand, the test equipment ( 4 ) of the electronic component ( 1 ) via the connecting element ( 3 ) and the contact agent ( 5 ) delivered response signals evaluate and thereby provide information about the electrical functionality of the electronic component to be tested ( 1 ) give.

In preferred embodiments, the testing device ( 4 ) with the handling device ( 2 ) and / or with the device for pusitioning the handling device ( 2 ) in an electrically conductive manner, so that, following the test procedure, the electronic component to be tested ( 2 ) optionally sorted by quality classes, can be selectively stored.

Preferably, the contact means ( 5 ) after a preset number of contacting operations by the electronic components to be tested ( 1 ) compared to the test position of the connecting element ( 3 ) and the test position of the electronic component ( 1 ) at least something shifted.

Due to this measure, a hitherto unused area of the contact agent ( 5 ) in the contact area between the electronic component to be tested ( 1 ) and the connecting element ( 3 ). It thus comes to a largely complete utilization of the total area of the contact agent ( 5 ).

In particularly preferred embodiments, the displacement of the contact means ( 5 ) compared to the test position of the connecting element ( 3 ) and the test position of the electronic component ( 1 ) in a y-contacting direction in the x and / or z direction, in a z-contacting direction in the x and / or y direction and in an x contacting direction in the z and / or y direction.

For particularly full utilization of the total area of the contact agent ( 5 ) this is, for example, at least the full length and / or width of the electronic device to be tested ( 1 ) and / or fractions thereof in a y-contact direction in the x and / or z direction, in a z contact direction in the x and / or y direction and in an x contact direction in the z and / or y direction. Direction at least somewhat displaceable.

Alternatively or additionally, it is possible to test the electronic component to be tested ( 1 ) together with the connecting element ( 3 ), while maintaining the end positions required for the test procedure, with respect to the optionally non-displaceable contact means ( 5 ) after the expiration of a preset number of contacting operations at least by the full length and / or width of the electronic component to be tested ( 1 ) and / or to shift at least a fraction thereof.

Preferably this displacement also takes place in a y-contacting direction in the x and / or z direction, in a z-contacting direction in the x and / or y direction and in an x-contacting direction in z and / or y direction.

In summary, it should be noted that the present invention provides a device for testing the electrical conductivity of electronic components, which even for several different embodiments of electronic components - and thus with a change of the component type - instead of a plurality of contact sockets only a single, relatively extremely inexpensive contact means ( 5 ) needed.

Another advantage is the fact that the contact means ( 5 ) not depending on the dimensions of the electronic device to be tested ( 1 ) each customer-specific in conjunction with long order times individually, but due to its universal usability for many embodiments of electronic components makes a storage profitable and thus immediately available under exclusion of a long order.

A further advantage of the device according to the invention is that the installation of the contact agent ( 5 ) in the test device is particularly simple, fast and without expensive adjustment and inspection is possible.

In the case of the test device according to the invention, it is furthermore particularly advantageous that the latter is suitable for cleaning the contact agent ( 5 ) between the electronic component ( 1 ) on the one hand and with the test equipment ( 4 ) electrically conductively connected connecting element ( 3 On the other hand, basically not needed. The device according to the invention consequently does not know the problem of a loss-making frequent standstill of the entire test device during the contact agent cleaning work which is usually to be carried out at short time intervals.

One greater Advantage of the device according to the invention is also to see that the contacting quality and measuring safety despite numerous contacts substantially constant and are very high, reducing the loss-making sorting out of electronically faultless components as faulty considerably reduced and the yield of flawless electronic components significantly elevated becomes.

The device according to the invention for testing the electrical functionality of electronic components is also advantageous because it reduces the area of the expensive contact means ( 5 ) in the Compared to the known from the prior art test device much more fully exploited and thus allows a cheaper test operation.

A significant advantage of the device according to the invention is finally to be seen in the fact that it has a contact means ( 5 ) has a very long service life and service life, whereby their profitability and profitability is very positively influenced.

Claims (12)

Device for testing the electrical functionality of electronic components ( 1 ), in particular of integrated circuits, with at least one electrically conductive connecting element ( 3 ), which on the one hand indirectly or directly with an electrical test device ( 4 ) for testing the electrical functioning of electronic components ( 1 ) is electrically conductively connected and on the other hand with at least one contact means ( 5 ) is directly or indirectly electrically conductively connected or can be brought into electrically conductive connection, wherein the electronic component to be tested ( 1 ) to the connecting element ( 3 ) opposite side of the contact agent ( 5 ) can be brought about to produce an electrically conductive contact, characterized in that the contact means ( 5 ) has a substantially film, foil, strip, sheet or sheet-like structure, in which perpendicular to the contact surface aligned contacting is at least somewhat elastic or inelastic, in the contacting electrically conductive and perpendicular to the contact direction is electrically insulating, wherein the contact means ( 5 ) on the one hand, or the connecting element ( 3 ) together with the electronic component ( 1 ) in fixed end assignment to one another on the other hand, are continuously displaceable in the direction of the z and / or x and / or y axis while maintaining the testability of the device. Device according to claim 1, characterized by at least one manual or automatic handling device ( 2 ) for the positioning of electronic components ( 1 ) in the x and / or y and / or z direction. Device according to claim 1 or 2, characterized in that the contact means ( 5 ) an elastomeric film ( 7 ) extending in the contact direction, at least partially into the film ( 7 ) integrated, essentially wire-shaped conductors ( 6 ). Apparatus according to claim 1, 2 or 3, characterized in that the contact means is substantially band-shaped and wound and reelable or rewindable in a removable cassette ( 8th ) or on an unwinding and reeling device integrated in the test device ( 9 ) is provided. Device according to one of the preceding claims, characterized in that the contact means ( 5 ) and / or the cassette ( 8th ) and / or the unwinding and reeling device ( 9 ) can be brought directly or indirectly to a preset temperature by heating and / or cooling. Device according to one of the preceding claims, characterized in that the connecting element ( 3 ; on the electronic component to be tested ( 1 ) facing side one or more electrically conductive connection elements in an arrangement which the connection element arrangement of the electronic component to be tested ( 1 ), wherein on the electronic component ( 1 ) facing away from the connecting element ( 3 ) and / or in its edge region one or more electrically conductive connection elements for the direct or indirect connection of a test device ( 4 ) are provided. Device according to one of the preceding claims, characterized in that the test device ( 4 ) to the device to be tested ( 1 ) via the connecting element ( 3 ) and the contact agent ( 5 ) and from the electronic component ( 1 ) via the connecting element ( 3 ) and the contact agent ( 5 ) evaluates delivered response signals. Device after a. of the preceding claims, characterized in that the contact means ( 5 ) after a preset number of contacting operations by the electronic components to be tested ( 1 ) in a y-contacting direction in the x and / or z direction, in a z-contacting direction in the x and / or y direction and in an x contacting direction in the z and / or y direction relative to the test position of the connecting element ( 3 ) and the test position of the electronic component ( 1 ) is at least somewhat displaceable, so that a previously unused area of the contact means ( 5 ) in the contact area between the electronic component to be tested ( 1 ) and the connecting element ( 3 ). Device according to one of the preceding claims, characterized in that for substantially complete utilization of the total area of the contact means ( 5 ) this at least the full length and / or width of the electronic device to be tested ( 1 ) and / or fractions thereof in a y-contacting direction in the x and / or z direction, in a z contacting direction in the x and / or y direction and in the case of an x contact line tion in the z and / or y direction is at least somewhat displaceable. Device according to one of the preceding claims, characterized in that for substantially complete utilization of the total area of the contact means ( 5 ) the electronic component to be tested ( 1 ) together with the connecting element ( 3 ), while maintaining the end positions suitable for the test procedure, with respect to the non-displaceable contact means ( 5 ) after expiration of a. preset number of contacting operations at least by the full length and / or width of the electronic component to be tested ( 1 ) and / or fractions thereof in a y-contact direction in the x and / or z direction, in a z contact direction in the x and / or y direction and in an x contact direction in the z and / or y direction. Direction are at least somewhat displaceable. Device according to one of the preceding claims, characterized in that the displacement of the contact means ( 5 ) in direct or indirect coupling with the movement of the handling device ( 2 ) occurs substantially to the exclusion of a reduction in the component throughput. Device according to one of the preceding claims, characterized in that the displacement of the contact means ( 5 ) by direct or indirect coupling with the movement of the handling device ( 2 ) during handling of the electronic component ( 1 ) and before and / or after the actual testing process.