CN105256369A - High-temperature-resistant horizontal multi-layer gas inlet device for SiC epitaxy - Google Patents
High-temperature-resistant horizontal multi-layer gas inlet device for SiC epitaxy Download PDFInfo
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- CN105256369A CN105256369A CN201510679240.3A CN201510679240A CN105256369A CN 105256369 A CN105256369 A CN 105256369A CN 201510679240 A CN201510679240 A CN 201510679240A CN 105256369 A CN105256369 A CN 105256369A
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- air inlet
- sleeve
- inlet circle
- circle
- gas inlet
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Abstract
The invention discloses a high-temperature-resistant horizontal multi-layer gas inlet device for SiC epitaxy. The device comprises an inner water jacket assembly, a gas inlet assembly and a mounting flange which are sequentially coaxially nested from inside to outside, wherein the gas inlet assembly comprises multiple layers of gas inlet rings and sealing rings which are coaxially nested in a spaced manner, the multiple layers of gas inlet rings are elongated layer by layer from outside to inside, a gas inlet is formed in the top end of each gas inlet ring, the tail end of each gas inlet ring is folded outwards in the radial direction to form a flared folded surface, the sealing rings are welded to the peripheries of the gas inlets and arranged on the outside of the mounting flange, the sealing rings are spaced and the sealing ring on the outermost layer and the mounting flange are also spaced. The device has the benefits as follows: welding seams formed between each sealing ring and the corresponding gas inlet ring are exposed out of the outer surface of the gas inlet device and are convenient to maintain; the sealing rings are arranged in a spaced manner, so that repair welding is facilitated.
Description
Technical field
The present invention relates to semiconductor material producing apparatus technical field, particularly relate to a kind of high temperature resistant horizontal multilayer diffuser for SiC extension.
Background technology
SiC material as make high temperature, high frequency, high-power and radioprotective device the third generation semiconductor material with wide forbidden band of great potential enjoy the concern of people.At present, SiC epitaxy technique is that the Si atom produced after silane and propane, under 1650 DEG C of high temperature, scission reaction occurs and C atom recombine generate SiC.The high temperature resistant horizontal multilayer diffuser for SiC extension of existing SiC epitaxial device is placed on the center of substrate tray, it comprise into process gas air inlet gas circuit and prevent the cooling water channel of its pre-reaction for cool process gas, cooling water channel, there is many places weld seam air inlet gas circuit and both junctions, under 1650 DEG C of worst hot cases, the high temperature resistant horizontal multilayer diffuser for SiC extension of many places weld seam has the following disadvantages: on (1) its cooling water channel, cracking at high temperature easily appears in weld seam, thus cause water coolant or water molecules to enter process cavity, cause the structure deteriorate even serious consequence such as chamber blast, (2) a lot of weld seam is enclosed in device inside, if internal layer weld seam leaks, then cannot detect and repair welding.
Summary of the invention
The technical problem to be solved in the present invention overcomes the deficiencies in the prior art, provides the high temperature resistant horizontal multilayer diffuser for SiC extension of a kind of convenient leak detection and repair welding.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
A kind of high temperature resistant horizontal multilayer diffuser for SiC extension, comprise inner water sleeve assembly coaxially sheathed successively from the inside to the outside, air intake assembly and mounting flange, described air intake assembly comprises the sheathed multilayer air inlet circle of coaxial spaced and wear ring, multilayer air inlet circle successively extends from outside to inside, inlet mouth is all offered in the top of each air inlet circle, end radially convolution forms the convolution face of bell mouth shape, the periphery welded seal ring of inlet mouth, described multiple wear ring be all arranged at mounting flange outside and between multiple wear ring, between outermost wear ring and mounting flange, equal interval is arranged.
Further improvement as technique scheme:
The convolution of described outermost layer air inlet circle towards on extend to form deep trouth, described mounting flange is covered in coordinate on deep trouth and with the outer peripheral edge of deep trouth and is welded and fixed, and described mounting flange is provided with the prosopyle be communicated with deep trouth.
Described inner water sleeve assembly comprises sleeve water coolant and hot process gases separated, described sleeve is one-body molded and spacer sleeve is located in the air inlet circle of innermost layer, one end of described sleeve is protruding relative to the air inlet circle of innermost layer, and the other end is that bell mouth shape structural arrangement is below the convolution face of innermost layer air inlet circle.
Described inner water sleeve assembly also comprises sleeve shrouding, pipeline and point water plate, the hydraucone bottom package sleeve shrouding of described sleeve is to form cooling chamber, described pipeline is inserted in above cooling chamber to sleeve shrouding vertically, described point of water plate is sheathed on one end of pipeline along the direction being parallel to sleeve shrouding, sheathed sleeve seal ring between the other end of described pipeline and sleeve, described sleeve seal ring is provided with the through hole be communicated with cooling chamber.
The convolution face of described multilayer air inlet circle extends to air outlet place and flushes, and between adjacent two layers air inlet circle, form induction trunk between innermost layer air inlet circle and sleeve, described induction trunk is all communicated with inlet mouth, air outlet.
A periphery correspondence welding even compression ring of air outlet described in each, described even compression ring is offered some even vent holes be communicated with induction trunk.
Inlet mouth described in each comprises some air inlet ports of the periphery uniform array along air inlet circle.
Described air intake assembly comprises three layers of air inlet circle, described three layers of air inlet circle are followed successively by outer air inlet circle, middle level air inlet circle and internal layer air inlet circle from outside to inside, and the top of the top of described outer air inlet circle, the top of middle level air inlet circle and internal layer air inlet circle all flushes with corresponding wear ring.
Compared with prior art, the invention has the advantages that:
1, multiple wear ring be all arranged at mounting flange outside and between multiple wear ring, between outermost wear ring and mounting flange equal interval arrange, the weld seam formed between each wear ring and corresponding each air inlet circle is all exposed to the outside surface of diffuser, convenient maintenance, and between each wear ring, interval is arranged, facilitates repair welding.
2, outermost layer air inlet circle convolution towards on extend to form deep trouth, can splendid attire water coolant in deep trouth, for supplement heat rejecter air intake assembly; In addition, the weld seam of mounting flange and deep trouth, away from high-temperature zone, improves the reliability of diffuser.
3, the sleeve of inner water sleeve assembly is one-body molded does not have weld seam, water coolant and hot process gases is separated completely, and after avoiding weld cracking, water molecules enters in process gas, thus causes diffuser to damage the danger of even blasting.
Accompanying drawing explanation
Fig. 1 is the structural representation of the high temperature resistant horizontal multilayer diffuser embodiment for SiC extension of the present invention.
Fig. 2 be Fig. 1 diffuser bottom the structural representation at air outlet place.
In figure, each label represents:
1, inner water sleeve assembly; 2, air intake assembly; 3, mounting flange; 4, wear ring; 5, deep trouth; 11, sleeve; 12, sleeve shrouding; 13, pipeline; 14, water plate is divided; 15, sleeve seal ring; 20, air inlet circle; 21, outer air inlet circle; 22, middle level air inlet circle; 23, internal layer air inlet circle; 200, inlet mouth; 210, convolution face; 220, air outlet; 230, even compression ring.
Embodiment
Fig. 1 shows a kind of high temperature resistant horizontal multilayer diffuser for SiC extension of the present invention, comprise inner water sleeve assembly 1 coaxially sheathed successively from the inside to the outside, air intake assembly 2 and mounting flange 3, this air intake assembly 2 comprises the sheathed multilayer air inlet circle 20 of coaxial spaced, multilayer air inlet circle 20 successively extends from outside to inside, inlet mouth 200 is all offered on the top of each air inlet circle 20, end radially convolution forms the convolution face 210 of bell mouth shape, the convolution face 210 of multilayer air inlet circle 20 is parallel to each other layout, the hot process gases axially entered sprays along being parallel to radial direction behind convolution face 210, the laminar gas ejection that the corresponding multilayer of multilayer air inlet circle 20 is parallel to each other.Hot process gases enters in air intake assembly 2 from inlet mouth 200, the periphery welded seal ring 4 of inlet mouth 200, and wear ring 4 is welded on corresponding each air inlet circle 20, for buffering and sealing; Multiple wear ring 4 be all arranged at mounting flange 3 outside and between multiple wear ring 4, between outermost wear ring 4 and mounting flange 3 equal interval arrange, weld seam between each wear ring 4 and corresponding each air inlet circle 20 is all exposed to the outside surface of diffuser, convenient maintenance, and between each wear ring 4, interval is arranged, facilitates repair welding.
In the present embodiment, the convolution face 210 of outermost layer air inlet circle 20 upwards extends to form deep trouth 5, and mounting flange 3 is covered in coordinate on deep trouth 5 and with the outer peripheral edge of deep trouth 5 and is welded and fixed.Mounting flange 3 is provided with the prosopyle be communicated with deep trouth 5.This mounting flange 3 and deep trouth 5 are welded and fixed the outer water jacket assembly of rear formation, can splendid attire water coolant in deep trouth 5, and for supplement heat rejecter air intake assembly 2, now, the weld seam of mounting flange 3 and deep trouth 5, away from high-temperature zone, improves the reliability of diffuser.
In the present embodiment, inner water sleeve assembly 1 comprises the sleeve 11 water coolant and hot process gases separated, and the one-body molded and spacer sleeve of this sleeve 11 is located in the air inlet circle 20 of innermost layer.One end of sleeve 11 is protruding relative to the air inlet circle 20 of innermost layer, the other end be bell mouth shape structural arrangement below the convolution face 210 of innermost layer air inlet circle 20, with the sleeve 11 of air inlet circle 20 similar, cooling performance is better.The sleeve 11 of the present embodiment is one-body molded does not have weld seam, water coolant and hot process gases is separated completely, and after avoiding weld cracking, water molecules enters in process gas, thus causes diffuser to damage the danger of even blasting.
In the present embodiment, inner water sleeve assembly 1 also comprises sleeve shrouding 12, pipeline 13 and point water plate 14, sleeve 11 is in horn-like structure, the hydraucone bottom package sleeve shrouding 12 of sleeve 11 is to form cooling chamber, pipeline 13 is inserted in above cooling chamber to sleeve shrouding 12 vertically, divide water plate 14 to be sheathed on one end of pipeline 13 along the direction being parallel to sleeve shrouding 12, sheathed sleeve seal ring 15 between the other end of pipeline 13 and sleeve 11, sleeve seal ring 15 is provided with the through hole be communicated with cooling chamber.Water coolant enters cooling chamber by pipeline 13, and after undue water plate 14 is shunted, the through hole flowing to sleeve seal ring 15 along sleeve 11 inwall is flowed out, thus cooling diffuser.
In the present embodiment, the convolution face 210 of multilayer air inlet circle 20 extends to air outlet 220 place and flushes, and form induction trunk between adjacent two layers air inlet circle 20, between innermost layer air inlet circle 20 and sleeve 11, induction trunk is all communicated with inlet mouth 200, air outlet 220.Hot process gases enters from inlet mouth 200, through induction trunk, flows to the ejection of air outlet 220 place along convolution face 210.
In the present embodiment, a periphery correspondence welding even compression ring 230 of each air outlet 220, even compression ring 230 is offered some even vent holes be communicated with induction trunk, and this structure makes even, the stable ejection of each laminar gas energy.
In the present embodiment, each inlet mouth 200 comprises some air inlet ports of the periphery uniform array along air inlet circle 20.Some air inlet ports are all arranged in wear ring 4.
In the present embodiment, air intake assembly 2 comprises three layers of air inlet circle 20, three layers of air inlet circle 20 are followed successively by outer air inlet circle 21, middle level air inlet circle 22 and internal layer air inlet circle 23 from outside to inside, and the top of the top of outer air inlet circle 21, the top of middle level air inlet circle 22 and internal layer air inlet circle 23 all flushes with corresponding wear ring 4.During process gas ejection in middle level air inlet circle 22, all there is gas spray in its outer air inlet circle 21 and internal layer air inlet circle 23, the process gas in middle level air inlet circle 22 is clipped in the middle, form three layers of stable laminar gas and spray.Certainly, in other embodiments, the laminar flow arrangement mode of other multilayers can also be had.
Although the present invention discloses as above with preferred embodiment, but and be not used to limit the present invention.Any those of ordinary skill in the art, when not departing from technical solution of the present invention scope, can utilize the technology contents of above-mentioned announcement to make many possible variations and modification to technical solution of the present invention, or being revised as the Equivalent embodiments of equivalent variations.Therefore, every content not departing from technical solution of the present invention, according to the technology of the present invention essence to any simple modification made for any of the above embodiments, equivalent variations and modification, all should drop in the scope of technical solution of the present invention protection.
Claims (8)
1. the high temperature resistant horizontal multilayer diffuser for SiC extension, comprise inner water sleeve assembly (1) coaxially sheathed successively from the inside to the outside, air intake assembly (2) and mounting flange (3), it is characterized in that, described air intake assembly (2) comprises the sheathed multilayer air inlet circle (20) of coaxial spaced and wear ring (4), multilayer air inlet circle (20) successively extends from outside to inside, inlet mouth (200) is all offered on the top of each air inlet circle (20), end radially convolution forms the convolution face (210) of bell mouth shape, the periphery welded seal ring (4) of inlet mouth (200), described multiple wear ring (4) be all arranged at mounting flange (3) outside and between multiple wear ring (4), between outermost wear ring (4) and mounting flange (3), equal interval is arranged.
2. the high temperature resistant horizontal multilayer diffuser for SiC extension according to claim 1, it is characterized in that, the convolution face (210) of described outermost layer air inlet circle (20) upwards extends to form deep trouth (5), it is upper and coordinate with the outer peripheral edge of deep trouth (5) and be welded and fixed that described mounting flange (3) is covered in deep trouth (5), and described mounting flange (3) is provided with the prosopyle be communicated with deep trouth (5).
3. the high temperature resistant horizontal multilayer diffuser for SiC extension according to claim 1, it is characterized in that, described inner water sleeve assembly (1) comprises the sleeve (11) water coolant and hot process gases separated, described sleeve (11) is one-body molded and spacer sleeve is located in the air inlet circle (20) of innermost layer, one end of described sleeve (11) is protruding relative to the air inlet circle (20) of innermost layer, and the other end is that bell mouth shape structural arrangement is in below, the convolution face (210) of innermost layer air inlet circle (20).
4. the high temperature resistant horizontal multilayer diffuser for SiC extension according to claim 3, it is characterized in that, described inner water sleeve assembly (1) also comprises sleeve shrouding (12), pipeline (13) and point water plate (14), hydraucone bottom package sleeve shrouding (12) of described sleeve (11) is to form cooling chamber, described pipeline (13) is inserted in cooling chamber vertically to sleeve shrouding (12) top, described point of water plate (14) is sheathed on one end of pipeline (13) along the direction being parallel to sleeve shrouding (12), sheathed sleeve seal ring (15) between the other end of described pipeline (13) and sleeve (11), described sleeve seal ring (15) is provided with the through hole be communicated with cooling chamber.
5. the high temperature resistant horizontal multilayer diffuser for SiC extension according to claim 3, it is characterized in that, the convolution face (210) of described multilayer air inlet circle (20) extends to air outlet (220) place and flushes, form induction trunk between adjacent two layers air inlet circle (20), between innermost layer air inlet circle (20) and sleeve (11), described induction trunk is all communicated with inlet mouth (200), air outlet (220).
6. the high temperature resistant horizontal multilayer diffuser for SiC extension according to claim 5, it is characterized in that, a periphery correspondence welding even compression ring (230) of air outlet described in each (220), described even compression ring (230) offers some even vent holes be communicated with induction trunk.
7. the high temperature resistant horizontal multilayer diffuser for SiC extension according to claim 1, it is characterized in that, inlet mouth described in each (200) comprises some air inlet ports of the periphery uniform array along air inlet circle (20).
8. the high temperature resistant horizontal multilayer diffuser for SiC extension according to any one of claim 1 to 7, it is characterized in that, described air intake assembly (2) comprises three layers of air inlet circle (20), described three layers of air inlet circle (20) are followed successively by outer air inlet circle (21), middle level air inlet circle (22) and internal layer air inlet circle (23) from outside to inside, and the top of the described top of outer air inlet circle (21), the top of middle level air inlet circle (22) and internal layer air inlet circle (23) all flushes with corresponding wear ring (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510679240.3A CN105256369A (en) | 2015-10-20 | 2015-10-20 | High-temperature-resistant horizontal multi-layer gas inlet device for SiC epitaxy |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510679240.3A CN105256369A (en) | 2015-10-20 | 2015-10-20 | High-temperature-resistant horizontal multi-layer gas inlet device for SiC epitaxy |
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| CN105256369A true CN105256369A (en) | 2016-01-20 |
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| CN201510679240.3A Pending CN105256369A (en) | 2015-10-20 | 2015-10-20 | High-temperature-resistant horizontal multi-layer gas inlet device for SiC epitaxy |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111020693A (en) * | 2019-12-27 | 2020-04-17 | 季华实验室 | Air inlet device of silicon carbide epitaxial growth equipment |
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| CN111020693A (en) * | 2019-12-27 | 2020-04-17 | 季华实验室 | Air inlet device of silicon carbide epitaxial growth equipment |
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Application publication date: 20160120 |
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