CN102592972B - Cleaning method of solar battery silicon chip - Google Patents

Cleaning method of solar battery silicon chip Download PDF

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Publication number
CN102592972B
CN102592972B CN201210017662.0A CN201210017662A CN102592972B CN 102592972 B CN102592972 B CN 102592972B CN 201210017662 A CN201210017662 A CN 201210017662A CN 102592972 B CN102592972 B CN 102592972B
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silicon chip
solar cell
cleaning
hydrogen peroxide
cleaning method
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CN201210017662.0A
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CN102592972A (en
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崔景光
汤欢
刘旭
张杜超
陈静
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Yingli Energy China Co Ltd
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Yingli Energy China Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention provides a cleaning method of a solar battery silicon chip, which comprises the following steps of: cleaning the solar battery silicon chip by adopting alcohol or terpineol to obtain the preliminarily-cleaned solar battery silicon chip; cleaning the preliminarily-cleaned solar battery silicon chip by adopting alkaline cleaner solution to obtain the alkaline-cleaned solar battery silicon chip; cleaning the alkaline-cleaned solar battery silicon chip by adopting water; cleaning the water-cleaned solar battery silicon chip by adopting hydrogen peroxide solution; and cleaning the hydrogen peroxide solution-cleaned solar battery silicon chip by adopting water to obtain the solar battery silicon chip which is more cleanly cleaned. The cleaning method of the solar battery silicon chip has the beneficial effect that metal powder and an organic solvent remaining on the surface of the solar battery silicon chip are respectively removed by the alkaline cleaner solution and the hydrogen peroxide solution, so that the metal powder and the organic solvent remaining on the surface of the solar battery silicon chip are reduced, and the reutilization rate of the solar battery silicon chip with unqualified printing paste is improved.

Description

The cleaning method of silicon chip of solar cell
Technical field
The present invention relates to Wafer Cleaning technical field in manufacture of solar cells process, more particularly, relate to a kind of cleaning method of silicon chip of solar cell.
Background technology
Solar cell is the device directly light energy conversion being become electric energy by photoelectric effect.The technical process manufacturing solar cell is: making herbs into wool, diffusion, periphery etching, PECVD (plasma enhanced chemical vapor deposition, Plasma Enhanced Chemical Vapor Deposition) and printing-sintering.
In printing-sintering technique, slurry is printed on front side of silicon wafer and the back side, after sintering, forms electrode, be used for the collection of electric charge, be conducive to the welding of assembly simultaneously.
Slurry refers to by silver powder, aluminium powder and inorganic bond frit, and organic carrier and other additives composition, wherein organic carrier comprises organic solvent and organic resin.
Based on the function of solar cell, stricter to the surface quality requirements of solar cell.In printing-sintering technique after printing slurry, if silicon chip surface has flaw, such as spot, printed patterns is imperfect, and namely this silicon chip printing slurry is defective, needs printing slurry defective, namely surperficial silicon chip defective picks out as recycling sheet, again puts into production.Recycling sheet is in manufacture of solar cells process, because equipment fault, peripheral condition ANOMALOUS VARIATIONS, silicon chip be contaminated etc., reason causes the surface quality of silicon chip to be affected, and needs the silicon chip restarting manufacture craft.Recycling silicon chip and normal silicon chip there are differences except thickness, do not have difference qualitatively.
Because the silicon chip surface after printing exists slurry, need the slurry of silicon chip surface to clean up just can again put into production, start making herbs into wool.At present, for the silicon chip that printing slurry rear surface is off quality, adopt alcohol and non-dust cloth to clean, most of slurry can be washed.But the metal dust that slurry contains and organic solvent portion can not be dissolved in alcohol, can be attached to silicon chip surface, cause using alcohol can not scrub completely.The silicon chip of non-wiped clean, namely surface attachment has the silicon chip of metal dust and organic solvent, puts into production, and there will be a large amount of underproof silicon chip after making herbs into wool, have a strong impact on the qualification rate of finished product, finally cause the re-using rate of the underproof silicon chip of printing slurry lower.
In sum, how a kind of cleaning method of silicon chip of solar cell is provided, reduce the metal dust and the organic solvent that remain in silicon chip of solar cell surface, and then improve the re-using rate of the underproof silicon chip of solar cell of printing slurry, be current those skilled in the art's problem demanding prompt solution.
Summary of the invention
In view of this, the invention provides a kind of cleaning method of silicon chip of solar cell, decrease the metal dust and organic solvent that remain in silicon chip of solar cell surface, and then improve the re-using rate of the underproof silicon chip of solar cell of printing slurry.
In order to achieve the above object, the invention provides following technical scheme:
A cleaning method for silicon chip of solar cell, comprising:
1) adopt alcohol or terpinol to clean described silicon chip of solar cell, obtain the silicon chip of solar cell of preliminary cleaning;
2) silicon chip of solar cell of alkaline cleaner solution to described preliminary cleaning is adopted to clean, obtain the silicon chip of solar cell of alkalescence cleaning, described alkaline cleaner solution can react with the metal dust remaining in described silicon chip of solar cell surface and be dissolved;
3) silicon chip of solar cell of water to described alkalescence cleaning is adopted to clean;
4) adopt hydrogen peroxide solution to clean the described silicon chip of solar cell cleaned with water, the oxidation in organic solvent remaining in described silicon chip of solar cell surface can be dissolved by described hydrogen peroxide solution;
5) adopt water to clean the described silicon chip of solar cell cleaned through described hydrogen peroxide solution, obtain the described silicon chip of solar cell cleaning cleaner.
Preferably, in the cleaning method of above-mentioned silicon chip of solar cell, described step 2) also comprise: in described alkaline cleaner solution, add ultrasonic wave, carry out ultrasonic cleaning.
Preferably, in the cleaning method of above-mentioned silicon chip of solar cell, described step 2) in, in described alkaline cleaner solution, the volume ratio of pure water and alkaline cleaner is between 7.5:1 and 15:1.
Preferably, in the cleaning method of above-mentioned silicon chip of solar cell, described step 2) in, adopt time that described alkaline cleaner solution cleans described silicon chip of solar cell between 30-150min.
Preferably, in the cleaning method of above-mentioned silicon chip of solar cell, described step 2) in, the silicon chip of solar cell of described preliminary cleaning is put into slide cassette and cleans, in described alkaline cleaner solution, add ultrasonic wave by ultrasonic generator.
Preferably, in the cleaning method of above-mentioned silicon chip of solar cell, described step 4) in, in described hydrogen peroxide solution, the mass concentration of hydrogen peroxide is between 5%-30%.
Preferably, in the cleaning method of above-mentioned silicon chip of solar cell, described step 4) in, adopt time that described hydrogen peroxide solution cleans described silicon chip of solar cell between 30-75min.
Preferably, in the cleaning method of above-mentioned silicon chip of solar cell, described step 3) and/or step 5) in, the mode specifically by submergence or spray of described cleaning is cleaned.
The cleaning method of silicon chip of solar cell provided by the invention, comprising: adopt alcohol or terpinol cleaning solar energy cell silicon chip, obtains the silicon chip of solar cell of preliminary cleaning; Adopt the silicon chip of solar cell of alkaline cleaner solution to preliminary cleaning to clean, obtain the silicon chip of solar cell of alkalescence cleaning; Water is adopted to clean the silicon chip of solar cell that alkalescence is cleaned; Hydrogen peroxide solution is adopted to clean the silicon chip of solar cell cleaned with water; Adopt water to clean the silicon chip of solar cell cleaned through hydrogen peroxide solution, obtain the described silicon chip of solar cell cleaning cleaner.
The cleaning method of silicon chip of solar cell provided by the invention, compared with prior art, add the cleaning of alkaline cleaner solution and hydrogen peroxide solution, alkaline cleaner solution can react with the metal dust remaining in silicon chip of solar cell surface and be dissolved, then use water cleaning solar energy cell silicon chip, and then the metal dust remaining in silicon chip of solar cell surface can be removed; The oxidation in organic solvent remaining in silicon chip of solar cell surface can be dissolved by hydrogen peroxide solution; Then water cleaning solar energy cell silicon chip is used, and then the organic solvent remaining in silicon chip of solar cell surface can be removed, namely the silicon chip of solar cell cleaning cleaner is obtained, finally decrease the metal dust and organic solvent that remain in silicon chip of solar cell surface, and then improve the re-using rate of the underproof silicon chip of solar cell of printing slurry.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The schematic flow sheet of the embodiment one of the cleaning method of the silicon chip of solar cell that Fig. 1 provides for the embodiment of the present invention;
The schematic flow sheet of the embodiment two of the cleaning method of the silicon chip of solar cell that Fig. 2 provides for the embodiment of the present invention.
Embodiment
For the purpose of quoting and know, now the technical term related in this patent is explained as follows:
Alkaline cleaner: a kind of conventional cleaning agent, mainly comprises caustic alkali, phosphate, silicate, carbonate, chelating agent and surfactant.
Ultrasonic cleaning: with ul-trasonic irradiation in cleaning solution, more effectively to remove the greasy dirt of surface of the work and the cleaning method of other impurity.
The invention provides a kind of cleaning method of silicon chip of solar cell, decrease the metal dust and organic solvent that remain in silicon chip of solar cell surface, and then improve the re-using rate of the underproof silicon chip of solar cell of printing slurry.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Please refer to accompanying drawing 1-2, the schematic flow sheet of the embodiment one of the cleaning method of the silicon chip of solar cell that Fig. 1 provides for the embodiment of the present invention; The schematic flow sheet of the embodiment two of the cleaning method of the silicon chip of solar cell that Fig. 2 provides for the embodiment of the present invention.
Please refer to the schematic flow sheet of the embodiment one of the cleaning method of the silicon chip of solar cell that accompanying drawing 1, Fig. 1 provides for the embodiment of the present invention, concrete grammar is as follows:
S101) adopt alcohol or terpinol cleaning solar energy cell silicon chip, obtain the silicon chip of solar cell of preliminary cleaning:
Most of material in slurry can be dissolved in alcohol or terpinol, adopt alcohol or terpinol capable of washing fall most of slurry, but the part metals powder in slurry and organic solvent can remain in the surface of silicon chip of solar cell;
S102) adopt the silicon chip of solar cell of alkaline cleaner solution to preliminary cleaning to clean, obtain the silicon chip of solar cell of alkalescence cleaning:
Alkaline cleaner solution can react with the metal dust remaining in silicon chip of solar cell surface and reaction product is dissolved in alkaline cleaner solution, and then eliminates the metal dust on silicon chip of solar cell surface;
S103) water is adopted to clean the silicon chip of solar cell that alkalescence is cleaned:
With water cleaning solar energy cell silicon chip, wash away the alkaline cleaner solution remaining in silicon chip of solar cell surface and the reaction product be dissolved in alkaline cleaner solution;
S104) hydrogen peroxide solution is adopted to clean the silicon chip of solar cell cleaned with water:
Hydrogen peroxide solution has strong oxidizing property, reaction product can be dissolved in hydrogen peroxide solution by the oxidation in organic solvent remaining in silicon chip of solar cell surface, and then can remove the organic solvent on silicon chip of solar cell surface;
S105) adopt water to clean the silicon chip of solar cell cleaned through hydrogen peroxide solution, obtain the silicon chip of solar cell cleaning cleaner:
With water cleaning solar energy cell silicon chip, wash away the hydrogen peroxide solution remaining in solar cell surface and the reaction product be dissolved in hydrogen peroxide solution, finally obtain the silicon chip of solar cell cleaning cleaner, can re-start and produce recycling.
The cleaning method of the silicon chip of solar cell that the embodiment of the present invention provides, compared with prior art, add the cleaning of alkaline cleaner solution and hydrogen peroxide solution, alkaline cleaner solution can react with the metal dust remaining in silicon chip of solar cell surface and be dissolved, then use water cleaning solar energy cell silicon chip, and then the metal dust remaining in silicon chip of solar cell surface can be removed; The oxidation in organic solvent remaining in silicon chip of solar cell surface can be dissolved by hydrogen peroxide solution; Then water cleaning solar energy cell silicon chip is used, and then the organic solvent remaining in silicon chip of solar cell surface can be removed, namely the silicon chip of solar cell cleaning cleaner is obtained, finally decrease the metal dust and organic solvent that remain in silicon chip of solar cell surface, and then improve the re-using rate of the underproof silicon chip of solar cell of printing slurry.
Preferably, in the cleaning method of the silicon chip of solar cell that above-described embodiment provides, step S104) in, in hydrogen peroxide solution, the mass concentration of hydrogen peroxide is between 5%-30%.Certainly, in hydrogen peroxide solution, the concentration of hydrogen peroxide can be also other numerical value, as long as can ensure that hydrogen peroxide solution washes organic solvent, the present invention does not limit particularly to this.
Preferably, in the cleaning method of the silicon chip of solar cell that above-described embodiment provides, step S104) in, adopt time that hydrogen peroxide solution cleans silicon chip of solar cell between 30-75min.The time of hydrogen peroxide solution cleaning is relevant with the mass concentration of hydrogen peroxide solution, and mass concentration is higher, and required scavenging period is shorter.
Preferably, in the cleaning method of the silicon chip of solar cell that above-described embodiment provides, described step S103) and/or step S105) in, the mode specifically by submergence or spray of cleaning is cleaned.Certainly, the mode of the present invention to water cleaning solar energy cell silicon chip does not limit particularly, as long as can ensure that the solution remaining in silicon chip of solar cell surface can clean up by water.
Please refer to the schematic flow sheet of the embodiment two of the cleaning method of the silicon chip of solar cell that accompanying drawing 2, Fig. 2 provides for the embodiment of the present invention, concrete grammar is as follows:
S201) adopt alcohol or terpinol cleaning solar energy cell silicon chip, obtain the silicon chip of solar cell of preliminary cleaning:
Most of material in slurry can be dissolved in alcohol or terpinol, adopt alcohol or terpinol capable of washing fall most of slurry, but the part metals powder in slurry and organic solvent can remain in the surface of silicon chip of solar cell;
S202) silicon chip of solar cell tentatively cleaned is put into slide cassette, employing adds the silicon chip of solar cell of hyperacoustic alkaline cleaner solution to preliminary cleaning and carries out ultrasonic cleaning, obtains the silicon chip of solar cell of alkalescence cleaning:
Alkaline cleaner solution can react with the metal dust remaining in silicon chip of solar cell surface and make reaction product be dissolved in alkaline cleaner solution, and then eliminate the metal dust on silicon chip of solar cell surface, simultaneously, adopt ultrasonic cleaning, can make alkaline cleaner solution impact consumingly silicon chip of solar cell and on metal dust, get final product intensified response effect, and then enhance the cleaning performance of alkaline cleaner solution;
S203) water is adopted to clean the silicon chip of solar cell that alkalescence is cleaned:
With water cleaning solar energy cell silicon chip, wash away the alkaline cleaner solution remaining in silicon chip of solar cell surface and the reaction product be dissolved in alkaline cleaner solution;
S204) hydrogen peroxide solution is adopted to clean the silicon chip of solar cell cleaned with water:
Hydrogen peroxide solution has strong oxidizing property, can remain in the oxidation in organic solvent on silicon chip of solar cell surface and is dissolved in hydrogen peroxide solution by its reaction product, and then can remove the organic solvent on silicon chip of solar cell surface;
S205) adopt water to clean the silicon chip of solar cell cleaned through hydrogen peroxide solution, obtain the silicon chip of solar cell cleaning cleaner:
With water cleaning solar energy cell silicon chip, wash away the hydrogen peroxide solution remaining in solar cell surface and the reaction product be dissolved in hydrogen peroxide solution, finally obtain the silicon chip of solar cell cleaning cleaner, can re-start and produce recycling.
In the cleaning method of the silicon chip of solar cell that above-described embodiment provides, slide cassette generally uses acid and alkali-resistance material to make, the quantity that can hold silicon chip of solar cell in slide cassette is 25,50 or 100 etc., and quantity is the multiple of 25, is convenient to statistics and produces.On chip or 50 slide cassettes on chip of usual use 25.
Preferably, in the cleaning method of the silicon chip of solar cell that above-described embodiment provides, step S202) in, in alkaline cleaner solution, the volume ratio of pure water and alkaline cleaner is between 7.5:1 and 15:1.Certainly, the component volume ratio of alkaline cleaner solution also can be other ratio, as long as can ensure that alkaline cleaner solution washes metal dust, the present invention does not limit particularly to this.
Preferably, in the cleaning method of the silicon chip of solar cell that above-described embodiment provides, step S202) in, adopt time that alkaline cleaner solution cleans silicon chip of solar cell between 30-150min.The time of alkaline cleaner solution cleaning is relevant with the concentration of alkaline cleaner solution, and concentration is higher, and required scavenging period is shorter.
Preferably, in the cleaning method of the silicon chip of solar cell that above-described embodiment provides, step S202) in, in alkaline cleaner solution, add ultrasonic wave by ultrasonic generator.General bottom ultrasonic generator being arranged on slide cassette.
Preferably, in the cleaning method of the silicon chip of solar cell that above-described embodiment provides, described step S203) and/or step S205) in, the mode specifically by submergence or spray of cleaning is cleaned.Certainly, the mode of the present invention to water cleaning solar energy cell silicon chip does not limit particularly, as long as can ensure that the solution remaining in silicon chip of solar cell surface can clean up by water.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein can without departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.

Claims (8)

1. a cleaning method for silicon chip of solar cell, is characterized in that, comprising:
1) adopt alcohol or terpinol to clean described silicon chip of solar cell, obtain the silicon chip of solar cell of preliminary cleaning;
2) silicon chip of solar cell of alkaline cleaner solution to described preliminary cleaning is adopted to clean, obtain the silicon chip of solar cell of alkalescence cleaning, described alkaline cleaner solution can react with the metal dust remaining in described silicon chip of solar cell surface and be dissolved;
3) silicon chip of solar cell of water to described alkalescence cleaning is adopted to clean;
4) adopt hydrogen peroxide solution to clean the described silicon chip of solar cell cleaned with water, the oxidation in organic solvent remaining in described silicon chip of solar cell surface can be dissolved by described hydrogen peroxide solution;
5) adopt water to clean the described silicon chip of solar cell cleaned through described hydrogen peroxide solution, obtain the described silicon chip of solar cell cleaning cleaner.
2. the cleaning method of silicon chip of solar cell according to claim 1, is characterized in that, described step 2) also comprise: in described alkaline cleaner solution, add ultrasonic wave, carry out ultrasonic cleaning.
3. the cleaning method of silicon chip of solar cell according to claim 2, is characterized in that, described step 2) in, in described alkaline cleaner solution, the volume ratio of pure water and alkaline cleaner is between 7.5:1 and 15:1.
4. the cleaning method of silicon chip of solar cell according to claim 3, is characterized in that, described step 2) in, adopt time that described alkaline cleaner solution cleans described silicon chip of solar cell between 30-150min.
5. the cleaning method of silicon chip of solar cell according to claim 2, it is characterized in that, described step 2) in, the silicon chip of solar cell of described preliminary cleaning is put into slide cassette and cleans, in described alkaline cleaner solution, add ultrasonic wave by ultrasonic generator.
6. the cleaning method of silicon chip of solar cell according to claim 1, is characterized in that, described step 4) in, in described hydrogen peroxide solution, the mass concentration of hydrogen peroxide is between 5%-30%.
7. the cleaning method of silicon chip of solar cell according to claim 6, is characterized in that, described step 4) in, adopt time that described hydrogen peroxide solution cleans described silicon chip of solar cell between 30-75min.
8. according to the cleaning method of the silicon chip of solar cell in claim 1-6 described in any one, it is characterized in that, described step 3) and/or step 5) in, the mode specifically by submergence or spray of described cleaning is cleaned.
CN201210017662.0A 2012-01-19 2012-01-19 Cleaning method of solar battery silicon chip Expired - Fee Related CN102592972B (en)

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CN108511321A (en) * 2018-03-19 2018-09-07 徐州鑫宇光伏科技有限公司 Do over again cleaning method and the reworking method of black silicon silicon chip after printing
CN109530374B (en) * 2018-11-21 2021-07-27 上海超硅半导体有限公司 Wafer box cleaning method
CN110416064B (en) * 2019-07-08 2021-07-16 阜宁苏民绿色能源科技有限公司 Method for removing oil stains on silicon wafer
CN111613519A (en) * 2020-03-19 2020-09-01 江苏高照新能源发展有限公司 Monocrystalline silicon wafer cleaning method
CN112436074A (en) * 2020-11-30 2021-03-02 中建材浚鑫科技有限公司 Texturing and cleaning process suitable for double-sided silicon solar cell

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